Thin Gate Valve with Diffusion-Bonded Bellows for Electron Microscope Integration
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Solution Overview
Problem
Conventional gate valves for electron microscopes and electron beam inspection apparatuses are too thick to be effectively integrated near the sample in small-sized devices, limiting their downsizing potential and compromising vacuum integrity.
Innovation Solution
A thin gate valve design featuring a bellows structure formed by diffusion-bonding multiple metal plates, with a valve body plate that is slidable and pressable by multiple pressing portions, allowing for reduced thickness and enhanced airtightness, and incorporating a sealing member for improved vacuum protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of moving object
If a conventional gate valve is used, then vacuum integrity is maintained, but the valve thickness is too large (10mm or more) to be integrated near the sample in small-sized devices
Solution Approach 1:
The gate valve is divided into multiple thin plate components (first plate, second plate, valve body plate) that are assembled together. Each plate is made thin (2-3mm total thickness) but they work together as a complete valve structure, allowing integration near the sample while maintaining vacuum integrity through the combined sealing surfaces and bellows structure.
Solution Approach 2:
The bellows structure made of flexible metal plates is used to provide pressing force while maintaining a thin profile. The bellows can expand and contract to apply consistent pressure on the valve body plate against the sealing surface, ensuring vacuum integrity without requiring thick rigid components.
2Volume of moving object
If the gate valve thickness is reduced to enable integration near the sample, then spatial room is saved, but airtightness may be compromised
Solution Approach 1:
The bellows structure provides flexible pressing portions that can apply uniform pressure across the valve body plate sealing surface despite the reduced thickness. The bellows expansion mechanism ensures consistent contact pressure to prevent air leakage while maintaining a compact 2-3mm valve thickness.
Solution Approach 2:
The pressing force parameters are optimized through the bellows structure design, allowing sufficient sealing pressure to be generated within the thin 2-3mm valve body. The bellows mechanical advantage enables high contact pressure at the sealing interface without requiring thick structural components.
3Reliability
If multiple pressing portions are added to ensure airtightness in a thin valve, then sealing reliability improves, but device complexity increases
Solution Approach 1:
Multiple pressing portions are integrated into a single bellows structure rather than being separate components. The bellows folds and expansion mechanism naturally creates multiple contact points with the valve body plate, providing distributed sealing pressure while maintaining a unified, compact structure that does not significantly increase overall complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The gate valve achieves a thickness of 2-3 mm, enabling its integration near the sample in small-sized devices while maintaining excellent airtightness and electrical conductivity for stray electron discharge.
Implementation Method 1
a bellows structure formed by diffusion-bonding a plurality of thin plates made of metal to each other
Data Source
AI summary
A gate valve 1 includes: a plate 2 having an opening portion 9; a plate 3 located opposite to the plate 2; a guide space 5 formed between the plates 2, 3; and a plate 6 provided in the space 5. The plate 6 is slidable along a direction in which an opening portion 11 is offset from the opening portion 9 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 13 and separated from the plate 2, and a position of the plate 6 is fixed with respect to the plate 2 in the space 5 in a state in which the plate 6 is pressed by the pressing portion 16 and is in contact with the plate 2. The pressing portions 13, 16 each have a bellows structure formed by diffusion-bonding metal plates 18 and 19 to each other.