Thin Membrane Electronic Circuit Fluid Pressure Sensor

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Solution Overview

Problem

Existing fluid pressure sensors are not compact enough for use in aggressive fluids and lack efficient integration of the electronic circuit with the pressure sensing membrane, limiting their stability and sealing effectiveness.

Innovation Solution

A fluid pressure sensor design where the electronic circuit is thin enough to form the membrane, with a reference chamber and thermoplastic enclosure, providing stability and sealing, and integrated with a leadframe and piezoresistive or piezoelectric sensors for deformation measurement, allowing for compact and aggressive fluid sensing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If the electronic circuit is made thinner to form the membrane, then the sensor achieves compact design and integration, but the structural stability and support for the circuit may be compromised

Engineering Contradiction:
Improvesensor sizeVSAvoidcircuit stability
Core Design Contradiction:
Volume of moving objectVSStability of the object's composition

Solution Approach 1:

The patent merges the electronic circuit with the membrane structure by making the circuit itself form the membrane in its thinnest section. This integration eliminates the need for a separate membrane component and achieves compact sensor design while maintaining functionality through the combined structure.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The electronic circuit is designed with variable thickness, being thinnest where it forms the membrane and thicker in adjacent sections. This local quality variation allows the circuit to provide both membrane functionality (thin section for pressure sensing) and structural support (thicker adjacent sections for stability).

Inventive Principle:
Principle #3Local quality

2Measurement precision

If the membrane is made thinner to enable pressure-induced deformation, then pressure sensitivity is improved, but the membrane strength and resistance to fluid aggression may be reduced

Engineering Contradiction:
Improvepressure sensitivityVSAvoidmembrane strength
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The electronic circuit and membrane are merged into a single integrated structure. The circuit's thin section serves as the membrane, eliminating the need for a separate membrane layer and reducing overall thickness while maintaining sufficient strength through the circuit's material properties and integrated design.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The membrane thickness is optimized to balance pressure sensitivity and strength requirements. The thin section of the electronic circuit provides sufficient deformation capability for pressure sensing while maintaining adequate strength to withstand aggressive fluids, achieving the right parameter balance for both sensitivity and durability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves a compact, stable, and sealed fluid pressure sensor capable of measuring aggressive fluids like motor oil, with enhanced stability and sealing, enabling precise pressure measurement across a wide range.

Implementation Method 1

the membrane needs to be so thin that a pressure-induced deformation of the membrane can take place

Methodology Applied
Scientific EffectPressure-induced deformation: Deformation

Implementation Method 2

integrated with a leadframe and piezoresistive or piezoelectric sensors for deformation measurement

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Implementation Method 3

integrated with a leadframe and piezoresistive or piezoelectric sensors for deformation measurement

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS9518883B2Fluid pressure sensor
Publication Date: 2016.12.13 HELLA GMBH & CO KGAA
  • US9518883B2 patent drawing
  • US9518883B2 patent drawing
  • US9518883B2 patent drawing

AI summary

In a fluid pressure sensor with a pressure sensing membrane and an electronic circuit, the electronic circuit is in a section realized so thin that a membrane is formed in this section of the electronic circuit. In the other sections, the electronic circuit is realized thicker than in the section that forms the membrane. This makes it possible to manufacture a particularly compact fluid pressure sensor.