Thin-Nickel ENEPIG Surface Finish for Reliable Embedded Die Attachments

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Solution Overview

Problem

Embedding circuit components within a package substrate is challenging due to thickness mismatches, leading to issues like tilting or shifting, and existing surface finishes without nickel in the electroless nickel-electroless palladium-immersion gold (ENEPIG) process result in solder joint reliability concerns and formation of brittle inter-metallic compounds.

Innovation Solution

Implementing a process flow that uses ENEPIG with a thin nickel layer or alternative surface finishes like immersion gold-electroless palladium-immersion gold (IGEPIG), indium, or cobalt-iron layers to address solder joint reliability and inter-metallic compound formation issues, while reducing the need for additional lithography steps and maintaining cost-effectiveness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a traditional ENEPIG surface finish with standard nickel layer thickness is used, then solder joint reliability is improved, but the formation of brittle inter-metallic compounds increases and manufacturing complexity increases due to additional lithography steps

Engineering Contradiction:
Improvesolder joint reliabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and removes the nickel layer from the traditional ENEPIG surface finish, creating a new ENIG (Electroless Nickel-Electroless Palladium-Immersion Gold) or EPG (Electroless Palladium-Immersion Gold) process. This extraction eliminates the need for additional lithography steps required for thick nickel deposition while maintaining solder joint reliability through optimized thinner nickel layers (50-200 nm) or alternative metal compositions.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent changes the thickness parameter of the nickel layer from traditional thick deposits (micrometers) to thin films (50-200 nm), and alternatively changes the material composition by using palladium or cobalt-iron layers. These parameter changes reduce the formation of brittle inter-metallic compounds and eliminate the need for additional lithography steps while maintaining or improving solder joint reliability.

Inventive Principle:
Principle #35Parameter changes

2Object-generated harmful factors

If the nickel layer thickness is reduced to minimize inter-metallic compound formation, then brittleness is reduced, but solder joint reliability may deteriorate

Engineering Contradiction:
Improvebrittle inter-metallic compoundsVSAvoidsolder joint reliability
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent uses composite material structures by combining multiple thin metal layers (nickel-palladium-gold in ENEPIG, or palladium-gold in EPG, or cobalt-iron-gold alternatives). This composite structure provides both mechanical strength for solder joint reliability and controlled inter-metallic compound formation at each interface, preventing excessive brittleness while maintaining reliability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent introduces palladium as an intermediary layer between nickel and gold, and between the metal stack and solder joint. This intermediary layer controls the formation of inter-metallic compounds, preventing direct reaction between nickel and solder while maintaining joint reliability. The palladium layer acts as a diffusion barrier and mechanical buffer.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If alternative surface finishes like IGEPIG or indium layers are used, then cost-effectiveness is improved and manufacturing steps are reduced, but solder joint reliability may be compromised

Engineering Contradiction:
Improvecost-effectivenessVSAvoidsolder joint reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent changes the material composition parameter by using indium layers or cobalt-iron alloys as alternatives to traditional nickel-palladium-gold stacks. These alternative materials provide comparable or superior solder joint reliability through different mechanisms (indium's low melting point and wetting properties, cobalt-iron's mechanical strength) while reducing manufacturing steps and costs by eliminating electroless nickel deposition and associated lithography requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed solutions enhance solder joint reliability, reduce the formation of brittle inter-metallic compounds, and improve wettability, providing better electrical connections and cost efficiency in integrated circuit packages.

Implementation Method 1

a first surface finish layer formed on the conductive contact, the first surface finish layer comprising nickel

Methodology Applied
Scientific EffectElectroless plating: Electroplating

Implementation Method 2

a second surface finish layer formed on the first surface finish layer, the second surface finish layer comprising palladium

Methodology Applied
Scientific EffectElectroless plating: Electroplating

Implementation Method 3

a third surface finish layer formed on the second surface finish layer, the third surface finish layer comprising gold

Methodology Applied
Scientific EffectImmersion plating: Electroplating

Data Source

PatentUS20250218925A1Electroless nickel-electroless palladium-immersion gold (enepig) with thin nickel layer as a surface finish for embedded die attachments
Publication Date: 2025.07.03 INTEL CORP
  • US20250218925A1 patent drawing
  • US20250218925A1 patent drawing
  • US20250218925A1 patent drawing

AI summary

In embodiments herein, a surface finish (SF) is formed on conductive contacts of a package substrate for connection to an embedded interconnect bridge circuitry die. In some embodiments, the SF may be electroless nickel-electroless palladium-immersion gold (ENEPIG). In other embodiments, the SF may be immersion gold-electroless palladium-immersion gold (IGEPIG). In other embodiments, the SF may include a layer of electrolytic palladium-gold on a layer of indium or on a layer of cobalt-iron.