Thin Single-Crystalline Semiconductor Films with Non-Lattice Optical Cavities

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Solution Overview

Problem

Ultra-thin semiconductor-based optoelectronic devices face limitations in light-matter interaction and performance due to the use of amorphous semiconductors, leading to suboptimal optoelectronic device performance.

Innovation Solution

The development of optoelectronic devices utilizing very thin single-crystalline inorganic semiconductor films in combination with non-lattice optical cavities, which enhance light-matter interactions through nanocavity interference, resulting in improved light absorption and reduced dark currents.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If amorphous semiconductors are used in ultra-thin films, then device miniaturization is achieved, but optoelectronic device performance is limited

Engineering Contradiction:
Improvesemiconductor film thicknessVSAvoidoptoelectronic device performance
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent changes the material parameter from amorphous to single-crystalline semiconductor structure, which fundamentally alters the optical and electrical properties. This parameter change enables ultra-thin films (≤100 nm) to maintain high crystalline quality and carrier mobility, resolving the contradiction between miniaturization and performance by showing that crystalline structure, not just thickness, is the critical factor for optoelectronic performance

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite structure combining single-crystalline semiconductor films with non-lattice-matched optical cavities. This composite approach allows the semiconductor to achieve both ultra-thin dimensions and enhanced light-matter interaction through the optical cavity resonance, simultaneously achieving miniaturization and improved optoelectronic performance

Inventive Principle:
Principle #40Composite materials

2Use of energy by moving object

If thin-film interference is used to enhance light matter interaction, then light absorption is improved, but device performance remains limited due to amorphous structure

Engineering Contradiction:
Improvelight matter interactionVSAvoidoptoelectronic device performance
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The patent changes the structural parameter from amorphous to single-crystalline, which fundamentally improves the material's optical absorption coefficient and carrier generation efficiency. This parameter change enables the thin-film interference effect to be fully utilized, as crystalline structures provide well-defined band structures and higher quality factors for resonant modes, thereby enhancing light-matter interaction and overall device performance simultaneously

Inventive Principle:
Principle #35Parameter changes

3Reliability

If single-crystalline semiconductor films are used, then optoelectronic performance is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveoptoelectronic device performanceVSAvoidfabrication process complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent segments the device into distinct functional layers: a single-crystalline semiconductor film for carrier generation, a dielectric spacer for optical field confinement, and a metal reflector for resonance enhancement. This segmentation allows each layer to be optimized independently and fabricated using standard thin-film deposition techniques, reducing overall manufacturing complexity while maintaining high performance

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a dielectric spacer as an intermediary layer between the single-crystalline semiconductor and the metal reflector. This intermediary enables the formation of a non-lattice optical cavity that enhances light-matter interaction without requiring lattice-matched epitaxial growth, thereby simplifying the fabrication process while maintaining the benefits of single-crystalline performance

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high photocurrent to dark current ratios and enhanced photoresponsivity, with the ability to tailor spectral responses, making it suitable for a wide range of electromagnetic spectrum detection.

Implementation Method 1

single-crystalline inorganic semiconductor films as phonon-absorbing layers

Methodology Applied
Scientific EffectPhonon absorption: Absorption (EM radiation)

Implementation Method 2

thin-film interference in lossy, ultra-thin semiconductor layers has been studied

Methodology Applied
Scientific EffectThin-film interference: Interference

Implementation Method 3

non-lattice optical cavities which enhance light-matter interactions through nanocavity interference

Methodology Applied
Scientific EffectOptical resonance: Resonance

Data Source

PatentUS10777700B2Optoelectronic devices based on thin single-crystalline semiconductor films and non-epitaxial optical cavities
Publication Date: 2020.09.15 WISCONSIN ALUMNI RES FOUND
  • US10777700B2 patent drawing
  • US10777700B2 patent drawing
  • US10777700B2 patent drawing

AI summary

Optoelectronic devices that use very thin single-crystalline inorganic semiconductor films as phonon-absorbing layers in combination with non-lattice optical cavities are provided.