Third-Order Setpoint Profile for Linear Motor Transport
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Solution Overview
Problem
Current linear motor systems (LMS) used for transporting fragile objects like semiconductor wafers and solar modules experience abrupt starts and stops, leading to vibrations and potential damage due to instantaneous acceleration and deceleration.
Innovation Solution
A transport device with at least two coils and a control unit that generates a third-order setpoint profile for smooth movement, using sensors to detect the carrier's position and velocity, and adjusting coil activation based on actual position to prevent abrupt changes, ensuring a stable and vibration-free transport.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If instantaneous acceleration and deceleration are applied to the carrier, then the transport speed and productivity are improved, but the fragile object starts to vibrate and may be damaged
Solution Approach 1:
The patent applies dynamic control by implementing a multi-stage acceleration and deceleration process instead of instantaneous changes. The control unit divides the movement into distinct phases (acceleration phase with first acceleration value, constant velocity phase, deceleration phase with second acceleration value) to dynamically adjust the carrier's motion profile, thereby maintaining productivity while preventing vibration and damage to fragile objects.
Solution Approach 2:
The patent changes the motion parameters (acceleration values, velocity, time) of the carrier systematically. By using different acceleration values for different phases and controlling the duration of each phase, the system transforms the harmful instantaneous parameter change into a controlled, gradual parameter transition that protects the fragile object while maintaining efficient transport.
2Reliability
If a complex multi-stage acceleration and deceleration control is implemented, then the fragile object is protected from damage, but the device complexity and control system complexity increase
Solution Approach 1:
The control method is segmented into distinct phases (acceleration phase, constant velocity phase, deceleration phase), each with specific control parameters. This segmentation allows the complex control task to be broken down into manageable, independent stages that can be implemented through systematic control logic, reducing overall system complexity while maintaining high reliability.
Solution Approach 2:
The patent implements feedback control by using sensors to detect the actual position of the carrier and comparing it with the target position. The control unit adjusts the acceleration and deceleration values based on this feedback, enabling automatic adaptation to actual conditions. This feedback mechanism simplifies the control system by allowing it to self-regulate rather than requiring complex pre-programmed control for all possible scenarios.
3Object-affected harmful factors
If the carrier moves smoothly with gradual acceleration and deceleration, then vibration and damage to the fragile object are prevented, but the transport time increases and productivity decreases
Solution Approach 1:
The patent applies partial acceleration and deceleration actions at specific phases of the transport cycle rather than throughout the entire movement. By using higher acceleration values during brief initial and final phases and maintaining constant velocity in the intermediate phase, the system achieves smooth transport that prevents vibration while minimizing the total time penalty, thus balancing object protection with productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures a smooth transport of fragile objects, reducing the risk of damage by eliminating abrupt movements and vibrations, thus providing a secure, cost-effective method for handling sensitive materials.
Implementation Method 1
coils of the linear motor are activated or deactivated in succession to move the carrier along the movement path
Implementation Method 2
a linear motor can be used, which operates according to an, inverted motor principle... coils of the linear motor are activated
Data Source
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AI summary
A transport device (10; 100; 1000) and a transport method for transporting a fragile object (3; 4), in particular a semiconductor wafer, a glass panel, a solar module, etc., are provided. The transport device (10; 100; 1000) comprises at least two coils (11, 12, 13, 14) for driving the object (3; 4) along a predetermined movement path (16), and a control unit (20) for controlling a movement of the object (3; 4) along the predetermined movement path (16), wherein the control unit (20) is further configured to base the control of the movement of the object (3; 4) on at least a third order setpoint profile, and wherein the control unit (20) is further configured to generate the third order setpoint profile for at least two coils (11, 12, 13, 14) in a synchronized manner.