Threaded Dispense Nozzle for Photoresist Coater Alignment
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor manufacturing, achieving uniform coatings on larger substrates is challenging due to misalignment of dispenser nozzles with the chuck, leading to non-uniform coating thickness, which affects the dimensions of integrated circuit features.
Innovation Solution
A screw-like dispense nozzle with a threaded outer surface and a tapered tip, integrated into a coating apparatus with an adjustable dispenser arm, allows for precise vertical and horizontal alignment using indicia and mechanical adjustments to ensure proper positioning over the chuck.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a standard dispense nozzle is used without alignment features, then the device complexity is reduced, but the manufacturing precision of the coating deteriorates
Solution Approach 1:
The dispense nozzle is designed with self-aligning features including a tapered tip that fits into a corresponding recess in the chuck, and indicia (markings) that enable automatic centering. When the nozzle is lowered onto the chuck, the tapered geometry and indicia automatically guide it to the correct horizontal and vertical position without requiring external alignment tools or complex adjustment mechanisms, thus achieving high coating uniformity while maintaining simple device structure
Solution Approach 2:
The nozzle incorporates visible indicia (markings or color-coded features) that change position relative to reference marks on the chuck as the nozzle is lowered. These visual indicators allow the operator to detect when the nozzle is properly centered horizontally and vertically, enabling precise alignment through simple visual observation rather than complex measurement systems
2Measurement precision
If manual alignment procedures are used, then the ease of operation is reduced, but the measurement precision of nozzle positioning is improved
Solution Approach 1:
The alignment system performs self-centering through the tapered tip geometry and matching recess. When the operator lowers the nozzle onto the chuck, the tapered surfaces automatically guide the nozzle to the centered position, eliminating the need for manual measurement and adjustment procedures while achieving high positioning accuracy
Solution Approach 2:
Visual indicia on the nozzle and corresponding reference marks on the chuck provide immediate visual feedback during the lowering process. When the indicia align with the reference marks, the nozzle is precisely centered, allowing operators to achieve accurate positioning through simple visual detection rather than complex measurement procedures
Data Source
AI summary
Provided is a fluid dispensing system with a dispense nozzle with a threaded outer surface and a fluid dispensing apparatus with a movable dispenser arm with an opening that includes threaded inner walls that receive the dispense nozzle therein. Also provided is a method for aligning a dispense head in a coating tool. Horizontal alignment is achieved by rotating the dispense nozzle until its tip is in contact with the chuck then laterally adjusting the dispenser arm position so that the tip is positioned over a center of the chuck. Vertical alignment is achieved by rotating the dispense nozzle until an indicia of the dispense nozzle is at the same vertical location as a designated physical feature of the dispenser arm.