Three-axis Hall Magnetometer With Vertical Assemblies
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing three-axis Hall magnetometers face limitations such as narrow working range, complex manufacturing processes, poor resistance to magnetic interference, and high production costs due to the use of planar Hall assemblies and magnetic beam sensors.
Innovation Solution
A three-axis Hall magnetometer integrated on a single substrate, comprising magnetic beam deflection structures with high permeability and vertical Hall assemblies, eliminating the need for planar Hall assemblies and simplifying the manufacturing process, thereby enhancing sensitivity and range while reducing costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If planar Hall assemblies and magnetic beam sensors are used to achieve three-axis magnetic field sensing, then measurement precision is improved, but device complexity increases and manufacturing precision requirements become more stringent
Solution Approach 1:
The patent combines multiple Hall assemblies (first and second Hall assemblies with different orientations) into a single integrated device structure. The first Hall assembly senses magnetic fields in one orientation while the second Hall assembly senses magnetic fields in a different orientation, allowing three-axis sensing to be achieved through integration rather than separate components. This reduces device complexity while maintaining measurement precision.
Solution Approach 2:
The Hall assemblies are designed to perform multiple functions: they simultaneously measure magnetic field strength and determine magnetic field orientation. By configuring the Hall assemblies at different orientations (e.g., 45 degrees relative to each other), the same structural elements serve both sensing purposes, eliminating the need for separate sensing mechanisms and reducing overall device complexity.
2Adaptability or versatility
If multiple Hall assemblies with different orientations are integrated on the same substrate, then three-axis sensing capability is improved, but manufacturing precision requirements increase
Solution Approach 1:
The Hall assemblies are pre-configured at specific orientations (e.g., 45 degrees) during the manufacturing process. By establishing these orientations in advance through standardized fabrication techniques, the patent ensures that the assemblies are correctly aligned before integration. This preliminary configuration reduces the precision requirements during final assembly, as the orientations are already established rather than requiring post-assembly alignment.
3Measurement precision
If magnetic beam sensors with ferromagnetic cores are used, then sensitivity to small magnetic fields is improved, but working range is limited due to magnetic saturation
Solution Approach 1:
The patent uses Hall assemblies with different orientation parameters (angular configurations) to sense magnetic fields from different directions. By changing the orientation parameter rather than relying on a single high-sensitivity magnetic beam sensor, the system maintains sensitivity to small fields while extending the working range through multi-axis measurement capability. The Hall effect-based sensing avoids the magnetic saturation issue that limits magnetic beam sensors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides improved resistance to magnetic interference, lower magnetic hysteresis, and a significantly expanded working range, making it suitable for low and high magnetic field measurements with reduced production costs.
Implementation Method 1
a vertical Hall assembly... the sensing direction of each vertical Hall assembly is parallel to the first plane... Each magnetic beam deflection structure is in an elongated shape with two parallel long sides and a length-width ratio greater than 2
Implementation Method 2
Each magnetic beam deflection structure is in an elongated shape with two parallel long sides and a length-width ratio greater than 2... comprising magnetic beam deflection structures with high permeability
Data Source
AI summary
A three-axis Hall magnetometer includes magnetic beam deflection structures located on a first plane and a plurality of vertical Hall assemblies located on a second plane without any planar Hall assembly. Each magnetic beam deflection structure is in an elongated shape and has a length-width ratio greater than 2. The magnetic beam deflection structure includes a first-type magnetic beam deflection structure, which extends in a first direction on the first plane. The sensing direction of each vertical Hall assembly is parallel to the first plane. The vertical Hall assemblies include first-type vertical Hall assemblies and second-type vertical Hall assemblies located near one long side of the first-type magnetic beam deflection structure. The plurality of vertical Hall assemblies further include third-type vertical Hall assemblies which have a sensing direction different from those of the first-type vertical Hall assemblies and the second-type vertical Hall assemblies.