Three-Axis Tuned Mass Damper for Turbo Molecular Pump Vibration
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Solution Overview
Problem
Existing damping systems for vacuum pumps in semiconductor manufacturing are ineffective at high speeds and limited to damping along one axis, increasing system complexity and mass, which affects the accuracy of inspection and metrology systems due to vibration transfer.
Innovation Solution
A three-axis tuned mass damper system for vacuum pumps, comprising a conic portion with a damping mass connected to a vacuum pump, designed to reduce vibrations across multiple axes by adjusting the overall mass and center of mass, using a conic and cylindrical structure with a base portion and tuning mass for precise attachment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If typical damping systems are used to dampen the connection between the vacuum pump and the vacuum chamber, then vibration damping is provided, but the damping effectiveness decreases at high speeds and the system is limited to damping along one axis
Solution Approach 1:
The patent transitions from one-axis damping to three-axis damping by strategically positioning dampers in multiple spatial dimensions. The first damper is positioned to dampen vibrations along a first axis, the second damper along a second axis, and the third damper along a third axis, providing comprehensive multi-directional vibration isolation for the vacuum pump.
Solution Approach 2:
The damping system is divided into multiple independent damper units, each responsible for damping vibrations along a specific axis. This segmentation allows each damper to be optimized for its specific directional function while collectively providing comprehensive three-axis damping coverage.
2Adaptability or versatility
If additional dampers are used to provide damping along other axes, then multi-axis damping coverage is improved, but the complexity and overall mass of the system increases
Solution Approach 1:
Each damper unit is designed to serve multiple functions: it provides damping along its primary axis while also contributing to overall vibration isolation in three-dimensional space. The dampers are positioned and configured to simultaneously address multiple vibration sources and transmission paths, reducing the need for additional specialized damping components.
3Adaptability or versatility
If additional dampers are used to provide damping along other axes, then multi-axis damping coverage is improved, but the overall mass of the system increases
Solution Approach 1:
The damping system applies localized mass and damping properties at specific critical points where vibration transmission occurs. Rather than uniformly distributing mass throughout the entire system, the dampers are strategically positioned at the vacuum pump mounting points and other critical vibration transmission paths, providing effective three-axis damping with minimized overall system mass.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively reduces vibrations by 40% to 90%, improving the accuracy of inspection and metrology systems by minimizing vibration transfer from vacuum pumps operating at high speeds.
Implementation Method 1
The mass damper may include a conic portion defined by a converging end and a diverging end. The conic portion may have a cone axis that is coaxial with the rotary axis of the vacuum pump, and a damping mass may be connected to the converging end of the conic portion.
Implementation Method 2
A three-axis tuned mass damper system for vacuum pumps, comprising a conic portion with a damping mass connected to a vacuum pump, designed to reduce vibrations across multiple axes by adjusting the overall mass and center of mass
Data Source
AI summary
A mass damper is connected to a vacuum pump to reduce vibrations during operation. The mass damper includes a conic portion defined by a converging end and a diverging end and a damping mass connected to the converging end of the conic portion. The vacuum pump has a pump body, a vacuum inlet in fluid communication with an internal volume of a vacuum chamber, a vacuum outlet, and a rotor assembly disposed within the pump body. The rotor assembly is configured to rotate about a rotary axis to pump gas from the internal volume of the vacuum chamber out of the vacuum outlet. The conic portion may have a cone axis that is coaxial with the rotary axis of the vacuum pump.