Three-Lens Optical Layout for Excimer Beam Phase Re-Inversion
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Solution Overview
Problem
Existing optical systems for excimer laser annealing in manufacturing processes, such as for organic light emitting display devices, face challenges with beam asymmetry due to shaking, leading to crystallization defects and inefficiencies due to the need for complex setups with multiple lenses, which complicates light efficiency and alignment.
Innovation Solution
An optical system comprising a first lens, a second lens, and a third lens, where the third lens is positioned between the first and second lenses, spaced apart by twice the focal length of the first lens, allowing for a re-inverted phase of the laser beam, facilitating intuitive alignment and maintaining beam homogeneity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If complex optical systems with multiple lenses are used to remove beam asymmetry, then beam symmetry is improved, but device complexity and alignment difficulty increase
Solution Approach 1:
The optical system is segmented into three distinct lenses with specific focal length relationships (f1, f2 where f2 ≥ 1.2f1 and f2 ≤ 1.6f1). The third lens is positioned at a specific distance (2f1) from the first lens, creating modular functional units that collectively correct beam asymmetry while maintaining manageable system complexity
Solution Approach 2:
The patent specifies precise parameter relationships between lenses: the focal length ratio (1.2-1.6 times) and the spacing distance (twice the first focal length). These parameter constraints optimize the beam symmetry correction while preventing excessive system complexity
2Stability of the object's composition
If complex optical systems with multiple lenses are used to remove beam asymmetry, then beam symmetry is improved, but light efficiency decreases
Solution Approach 1:
Each lens in the three-lens system has specific local optical properties and surface curvatures designed to address particular aspects of beam asymmetry. The third lens, positioned at 2f1 from the first lens, provides localized correction that collectively restores beam symmetry without requiring excessive light redirection
Solution Approach 2:
The patent employs an inverted optical configuration where the third lens is positioned between the first and second lenses rather than in a conventional sequential arrangement. This inverted layout optimizes light path efficiency while achieving beam symmetry correction
3Stability of the object's composition
If complex optical systems with multiple lenses are used to remove beam asymmetry, then beam symmetry is improved, but alignment difficulty increases
Solution Approach 1:
The optical system is pre-configured with fixed geometric relationships: the third lens is positioned at exactly 2f1 from the first lens, and the focal length ratio between lenses is predetermined (1.2-1.6 times). This preliminary setup eliminates the need for complex real-time alignment adjustments, improving operational ease
Solution Approach 2:
By constraining the focal length parameters (f2 = 1.2-1.6f1) and spacing parameters (distance = 2f1), the system reduces the degrees of freedom requiring alignment adjustment, making the system easier to operate and align
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures that the laser beam maintains a consistent phase through the optical system, allowing for more intuitive alignment and improved crystallization processes by ensuring the beam is properly focused and aligned, reducing defects and enhancing efficiency.
Implementation Method 1
An optical system includes: a first lens comprising a first surface and a second surface opposite to the first surface, the first lens having a first focal length, a second lens comprising a third surface and a fourth surface opposite to the third surface, the second lens having a second focal length, and a third lens between the first lens and the second lens
Data Source
AI summary
An optical system and a laser device including an optical system are provided. An optical system includes a first lens including a first surface and a second surface opposite to the first surface, the first lens having a first focal length, a second lens including a third surface and a fourth surface opposite to the third surface, the second lens having a second focal length, and a third lens between the first lens and the second lens and spaced apart from the first lens by twice the first focal length.