Throttle Valve Bushing Isolates Spring From Airflow
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Throttle valves in semiconductor processing chambers suffer from particle pollution, which leads to unstable pressure control and reduced lifespan due to contaminants condensing on inner elements, interfering with airflow regulation.
Innovation Solution
A throttle valve design featuring a bushing that separates airflow from the spring and cover flange, preventing particle deposition and maintaining the degree of opening, comprising a valve plug, hollow seal, cover, and spring with a bushing flange and through hole to enhance ozone erosion resistance, ensuring stable pressure and extended valve lifetime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the throttle valve is used to control airflow in the vacuum line, then the process chamber containment is maintained, but particle pollution deposits on the inner elements of the throttle valve, decreasing its ability to control airflow
Solution Approach 1:
The patent extracts the harmful airflow path from the internal structure of the throttle valve. By removing the internal passage that allowed particles to deposit on the valve plug and inner elements, the design eliminates the pollution source while maintaining the valve's airflow control function through the external passage configuration
Solution Approach 2:
The patent employs a hollow seal (flexible element) that abuts the valve plug to create a sealing interface. This flexible sealing mechanism allows the valve to maintain reliable airflow control without rigid internal passages that would accumulate particles, as the seal adapts to the valve plug position while preventing leakage
2Reliability
If the stepper motor repeatedly modifies the degree of opening of the throttle valve to compensate for particle pollution, then the valve attempts to maintain pressure control, but the pressure within the processing chamber becomes unstable and the lifetime of the throttle valve decreases
Solution Approach 1:
By extracting and eliminating the internal airflow passage that caused particle accumulation, the patent prevents the root cause of valve degradation. This eliminates the need for repeated stepper motor adjustments and extends the valve's operational lifetime while maintaining stable pressure control
Solution Approach 2:
The external airflow passage design allows the throttle valve to maintain its airflow control ability without requiring active compensation or repeated adjustments. The valve serves itself by having a pollution-resistant structure that maintains stable operation over extended periods
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively prevents particle deposition on critical components, stabilizes processing chamber pressure, and increases the throttle valve's lifespan by isolating airflow and maintaining consistent airflow regulation.
Implementation Method 1
The spring abuts the cover flange to apply an elastic force to the hollow seal for tightly contacting the hollow seal with the valve plug
Implementation Method 2
the bushing separates the air flow from the spring and the cover flange
Data Source
AI summary
A throttle valve is provided, including a throttle valve body, a valve plug, a hollow seal, a cover, a spring, and a bushing. A flow path is formed in the throttle valve body. The valve plug is disposed in the throttle valve body. The degree of opening of the flow path is modified by rotating the valve plug. The hollow seal is disposed in the throttle valve body. The hollow seal abuts the valve plug. The cover is connected to the throttle valve body. An outlet is formed on the cover, the cover comprises a cover flange, and the cover flange surrounds the outlet. The spring abuts the cover flange to apply an elastic force to the hollow seal for tightly contacting the hollow seal with the valve plug. The spring is telescoped on the bushing, and a first end of the bushing pushes the hollow seal.