Throttle Valve Self-Cleaning Scraper for Semiconductor Pressure Stability
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Solution Overview
Problem
Throttle valves in semiconductor processing chambers are prone to contamination by particulate matter, leading to unstable pressure control and reduced lifespan due to particle deposition on their inner elements, which interferes with airflow regulation.
Innovation Solution
A throttle valve design featuring a valve plug with a notch and embedded scrapers that rotate to clean the hollow seal and body inner walls, preventing particle deposition and maintaining flow path integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional throttle valve is used in a vacuum system, then the valve can control airflow, but particulate matter deposits on the inner elements causing pressure instability and reduced valve lifespan
Solution Approach 1:
The throttle valve incorporates scrapers that automatically clean the inner surfaces of the valve body and hollow seal during normal operation. The scrapers are driven by the rotation of the valve plug itself, eliminating the need for external cleaning mechanisms. This self-cleaning function prevents particle deposition that would otherwise cause pressure instability and valve failure.
Solution Approach 2:
The scrapers are positioned to clean the inner surfaces before particles can accumulate to problematic levels. By continuously removing particles during valve operation, the system prevents the harmful effects of particle deposition rather than addressing them after they occur.
2Device complexity
If the throttle valve operates without cleaning mechanisms, then the structure remains simple, but particle pollution accumulates on inner elements decreasing airflow control ability
Solution Approach 1:
The valve plug serves dual functions: it controls airflow by rotating to adjust the opening degree, and it drives the scrapers to clean the inner surfaces. This multi-functionality integrates the cleaning mechanism into the existing valve structure without adding separate complex cleaning systems.
Solution Approach 2:
The scraping function is merged with the valve plug assembly. The scrapers are mounted on the valve plug and rotate together with it, combining the flow control and cleaning functions into a single integrated mechanism rather than separate systems.
3Reliability
If periodic cleaning is performed on the throttle valve, then particle deposition is removed, but production processing is interrupted and time is lost
Solution Approach 1:
The cleaning action occurs continuously during valve operation rather than requiring periodic shutdowns. As the valve plug rotates during normal airflow control, the attached scrapers continuously scrape particles from the inner surfaces, maintaining cleanliness without interrupting production processing.
Solution Approach 2:
The valve cleans itself during normal operation using its own rotational motion to drive the scrapers. This eliminates the need for external cleaning interventions that would require stopping production, allowing continuous operation while maintaining valve cleanliness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents particle deposition, stabilizes pressure within the processing chamber, and extends the throttle valve's lifespan by ensuring consistent airflow regulation.
Implementation Method 1
the first scraper abuts the abutting portion to clean the abutting portion
Data Source
AI summary
A throttle valve is provided. The throttle valve includes a throttle valve body, a valve plug, a hollow seal and a first scraper. A flow path is formed in the throttle valve body. The valve plug is disposed in the throttle valve body. A notch is formed on the valve plug. By rotating the valve plug, the position of the notch is changed, and the degree of opening of the flow path is modified. The hollow seal is disposed in the throttle valve body. An abutting portion is formed on the hollow seal, and the abutting portion sealably abuts the valve plug. The first scraper is disposed on the valve plug. When the valve plug is rotated, the first scraper abuts the abutting portion to clean the abutting portion.