Thrust Generation Mechanism for Compact XY Stage

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Solution Overview

Problem

Conventional thrust generation mechanisms in linear motors suffer from reduced magnetic efficiency due to long magnetic flux paths, increased weight, and high leakage flux, leading to reduced precision and limited installation options for XY and XYZ stages.

Innovation Solution

A thrust generation mechanism with armature and mover components featuring polar teeth and a core that connects them, where the armature cores have the same polarity and are arranged with specific pitches to minimize leakage flux and optimize magnetic flux direction, allowing for a compact and lightweight drive device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If alternate magnetic polarities are generated by the armature winding via the magnetic pole and armature core, then a force acts on the permanent magnets, but the path of magnetic fluxes becomes long, reducing magnetic efficiency and increasing weight

Engineering Contradiction:
Improveforce on permanent magnetsVSAvoidmagnetic efficiency
Core Design Contradiction:
ForceVSLoss of energy

Solution Approach 1:

The armature is divided into multiple armature cores (first, second, third, and fourth armature cores) arranged in parallel. Each armature core generates magnetic flux in the same direction, creating multiple independent magnetic pathways. This segmentation allows the magnetic flux to travel shorter distances through each individual core rather than through a single long path, thereby improving magnetic efficiency while maintaining the required force generation capability.

Inventive Principle:
Principle #1Segmentation

2Force

If adjacent magnetic poles have different magnetic polarities, then a force acts on the permanent magnets, but magnetic flux in reverse directions is generated, making the armature core complex and requiring the armature winding to be arranged apart from the magnet-facing portion

Engineering Contradiction:
Improveforce on permanent magnetsVSAvoidarmature core complexity
Core Design Contradiction:
ForceVSDevice complexity

Solution Approach 1:

Each armature core is designed with localized polarity characteristics where adjacent poles have different polarities (N and S), but all cores collectively produce magnetic flux in the same direction. The first and second armature cores have N poles facing the first permanent magnet, while the third and fourth armature cores have S poles facing the second permanent magnet. This local quality approach allows force generation at each location while maintaining uniform flux direction across the entire armature structure, simplifying the overall design.

Inventive Principle:
Principle #3Local quality

3Force

If a conventional drive device is used, then thrust can be generated, but leakage flux is large, resulting in increased size and weight, which causes deformation by own weight and reduces precision

Engineering Contradiction:
ImprovethrustVSAvoiddrive device weight
Core Design Contradiction:
ForceVSWeight of stationary object

Solution Approach 1:

Multiple armature cores (first, second, third, and fourth armature cores) are merged into a single integrated armature structure with a common winding. The cores are arranged in parallel and share the same magnetic circuit path, allowing them to work together as one unified system. This merging reduces the overall size compared to using separate drive devices, minimizes leakage flux through efficient flux utilization, and maintains sufficient thrust generation capability while reducing weight-induced deformation.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces leakage flux, enhances magnetic efficiency, and results in a compact, lightweight drive device that improves the precision and responsiveness of XY and XYZ stages.

Implementation Method 1

a force acts on the permanent magnets by allowing a current to flow through the armature winding

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a large attraction force acts between a mover including a magnet array and an armature

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Implementation Method 3

a large attraction force acts between a mover including a magnet array and an armature

Methodology Applied
Scientific EffectMagnetic attraction: Magnetism

Data Source

PatentUS9000626B2Thrust generation mechanism, drive device, XY stage and XYZ stage
Publication Date: 2015.04.07 HITACHI LTD
  • US9000626B2 patent drawing
  • US9000626B2 patent drawing
  • US9000626B2 patent drawing

AI summary

A thrust generation mechanism includes magnetic pole teeth which are arranged so as to sandwich and hold permanent magnets disposed on movers, cores which serially connect the magnetic pole teeth which sandwich and hold the magnets, armature winding wires which are collectively wound around the cores, and the movers having the magnets arranged such that the different magnetic poles thereof alternately face the front side and the rear side. The magnetic pole teeth which are arranged so as to sandwich and hold the permanent magnets and the armature iron cores which have cores serially connecting the magnetic pole teeth which hold the magnets are arranged in the longitudinal direction of the movers, and armature iron cores have a common winding wire. A stage is provided with a small-sized lightweight drive device which comprises magnetic pole teeth which are arranged on both sides of each permanent magnet with gaps therebetween, cores which connect the magnetic pole teeth, armatures which have armature winding wires wound around the magnetic pole teeth, and a row of the permanent magnets which is arranged such that the different magnetic poles are arranged alternately. The small-sized lightweight drive device is configured so that the number of the magnetic poles of the armatures is changed according to a thrust pattern required by the drive device.