Non-Contact THz Probe Test Bed for Sub-Millimeter Device Characterization
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Solution Overview
Problem
There is a lack of suitable probes for characterizing devices in the submillimeter or terahertz frequency range, as traditional contact probes are not applicable due to the small dimensions of high-speed devices like heterostructure backward diodes and high electron mobility transistors, necessitating indirect impedance characterization methods.
Innovation Solution
A non-contact characterization apparatus using planar antennas and a planar waveguide to guide terahertz or millimeter wave radiation between the antennas and a device-under-test, with a beam forming apparatus to transmit and receive wireless signals for analysis using a vector network analyzer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If contact probes are used to characterize high-speed devices in the terahertz band, then measurement accuracy can be achieved, but the small device dimensions (micrometer to nanometer scale) prevent direct probe contact and increase parasitics
Solution Approach 1:
The patent replaces mechanical contact probes with a non-contact measurement system using terahertz radiation. The system transmits terahertz waves through a waveguide to the device under test and detects the reflected or transmitted waves to characterize impedance, eliminating the need for physical contact and enabling measurement of sub-millimeter devices without parasitic effects from contact probes.
Solution Approach 2:
The patent introduces terahertz radiation as an intermediary to transfer energy and information between the measurement system and the device under test. The waveguide serves as a mediator to guide the terahertz waves, and the planar antenna acts as an intermediary to couple the radiation with the device, enabling non-contact characterization.
2Ease of operation
If indirect impedance characterization methods are used for THz antennas, then measurement can be performed without direct contact, but measurement accuracy and reliability are compromised
Solution Approach 1:
The patent replaces indirect measurement methods with a direct non-contact measurement system. By using terahertz radiation guided through a waveguide and coupled with the device via a planar antenna, the system achieves both non-contact operation and accurate impedance characterization through direct electromagnetic field interaction.
Solution Approach 2:
The patent changes the measurement parameter from electrical contact-based impedance measurement to electromagnetic radiation-based measurement. By operating in the terahertz frequency range and using planar antenna structures, the system achieves accurate impedance characterization without the limitations of traditional contact probes.
3Productivity
If traditional contact probes are used for millimeter wave devices, then characterization can be performed, but signal losses increase and coupling efficiency decreases due to parasitics
Solution Approach 1:
The patent replaces contact probe-based characterization with non-contact terahertz radiation-based measurement. This substitution eliminates parasitic inductance and capacitance associated with contact probes, reducing signal losses and improving coupling efficiency between the measurement system and the device under test.
Solution Approach 2:
The patent uses terahertz radiation as an intermediary to couple energy and information to the device without physical contact. The waveguide and planar antenna serve as mediators that efficiently transfer the terahertz waves to the device, minimizing energy losses compared to traditional contact methods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient characterization of high-speed devices without electrical contact, reducing signal losses and enhancing coupling efficiency, allowing for accurate impedance measurement and spectroscopic analysis in the terahertz and millimeter wave regimes.
Implementation Method 1
a planar waveguide arranged to guide THz or mmW radiation between the first and second planar antennas
Implementation Method 2
a beam forming apparatus arranged to transmit a probe THz or mmW radiation beam to the first planar antenna of the test fixture
Implementation Method 3
an electronic analyzer configured to wirelessly receive a THz or mmW signal emitted by the second planar antenna responsive to transmission of the probe THz or mmW radiation beam
Data Source
AI summary
A test fixture for characterizing a device-under-test (DUT) includes first and second planar antennas and a planar waveguide arranged to guide terahertz (THz) and/or millimeter wave (mmW) radiation between the first and second planar antennas. The planar waveguide is further configured to couple THz and/or mmW radiation guided between the first and second planar antennas with the DUT. A beam forming apparatus is arranged to transmit a probe THz and/or mmW radiation beam to the first planar antenna of the test fixture. An electronic analyzer is configured to wirelessly receive a THz and/or mmW signal emitted by the second planar antenna responsive to transmission of the probe THz and/or mmW radiation beam to the first planar antenna. The planar antennas may be asymmetrical beam-tilted slot antennas.