THz Sensing via Dynamic Plasmonic Structures

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Solution Overview

Problem

Existing THz sensing technologies face challenges in analyzing small volume samples due to weak THz response signals and the need for complex microfabrication of plasmonic antennas, which limits adaptability and sensitivity across a broad frequency range.

Innovation Solution

The use of structured optical pumping of thin-film semiconductor layers with patterned resonant and waveguide structures allows active control of localized and propagating surface plasmon polaritons, enabling sensitive THz sensing without microfabrication, by modulating the pump beam's intensity and shape to change the plasmonic structures and properties dynamically.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If microfabricated plasmonic antennas are used to enhance THz sensitivity, then THz sensitivity is improved, but device complexity and manufacturing complexity increase

Engineering Contradiction:
ImproveTHz sensitivityVSAvoidantenna structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent replaces the mechanical microfabrication process with an optical approach. A spatial light modulator (SLM) is used to project patterns that optically define plasmonic antenna structures on a semiconductor substrate. This optical patterning method eliminates the need for complex microfabrication steps while achieving the same field confinement and enhancement effects, thereby reducing device complexity and manufacturing complexity while maintaining THz sensitivity enhancement.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces dynamic reconfigurability by using an SLM to dynamically change the pattern of light projected onto the semiconductor substrate. This allows the plasmonic antenna structures to be reconfigured in real-time, enabling the system to adapt to different measurement requirements without physical re fabrication. The dynamic control of antenna parameters (such as resonant frequency and geometry) simplifies the overall system by replacing multiple fixed antennas with a single reconfigurable structure.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If multiple sets of antennas with different resonant frequencies are fabricated to cover broad THz range, then frequency range is improved, but manufacturing complexity and time increase

Engineering Contradiction:
ImproveTHz frequency range coverageVSAvoidantenna fabrication complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent implements a single universal antenna structure on the semiconductor substrate that can operate across a broad THz frequency range. The SLM dynamically adjusts the optical pattern to change the antenna's resonant frequency and geometry, allowing one physical structure to perform the function of multiple fixed-frequency antennas. This multi-functional approach eliminates the need to fabricate multiple antenna sets, significantly reducing manufacturing complexity and time while maintaining broad frequency coverage.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent changes the operational parameters of the antenna by varying the optical projection pattern through the SLM. By modifying parameters such as the size, shape, and distribution of illuminated regions on the semiconductor substrate, the system tunes the antenna's resonant frequency across the THz spectrum. This parameter-based tuning approach replaces the need for physical re fabrication of antennas with different geometries, simplifying manufacturing while achieving broad frequency range coverage.

Inventive Principle:
Principle #35Parameter changes

3Ease of manufacture

If fixed geometry antennas are used, then manufacturing is simplified, but adaptability and sensitivity optimization are reduced

Engineering Contradiction:
Improveantenna fabrication simplicityVSAvoidsensitivity optimization capability
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The patent transforms the static antenna geometry into a dynamic structure controlled by optical projection. The SLM enables real-time modification of the antenna's effective geometry by changing the light pattern on the semiconductor substrate. This allows the system to maintain manufacturing simplicity (single substrate preparation) while achieving adaptability and sensitivity optimization through dynamic reconfiguration of antenna parameters such as resonant frequency, field distribution, and coupling strength to match specific sample characteristics.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances THz sensitivity and allows broadband spectroscopy by varying the resonant frequency and local field enhancements, enabling sensitive and continuous measurement of small volume samples across a wide THz range without the need for complex fabrication.

Implementation Method 1

a semiconductor layer (e.g. a thin-film semiconductor layer) is provided, wherein the semiconductor layer has a THz frequency range surface adapted to exhibit surface plasmons when exposed to optical energy

Methodology Applied
Scientific EffectPhotoconductivity: Photoconductivity

Implementation Method 2

surface plasmon polaritons (SPPs) are excited in the semiconductor layer so that the SPPs are localized to a surface region of the semiconductor layer

Methodology Applied
Scientific EffectSurface plasmon polariton:

Data Source

PatentEP2824435B1Terahertz frequency sensing
Publication Date: 2016.06.01 FOM INST FOR ATOMIC & MOLECULAR PHYSICS
  • EP2824435B1 patent drawingFigure 1
  • EP2824435B1 patent drawingFigure 2
  • EP2824435B1 patent drawingFigure 3

AI summary

A sensor system is described wherein the sensor system comprises a support substrate comprising a semiconductor , preferably a high mobility (intrinsic) thin-film semiconductor; and, an optical system comprising an optical source and a geometrically shaped optical mask, preferably a computer-controlled spatial light modulator, said optical system being configured for exposing at least part of said thin-film semiconductor with a geometrically shaped (pulsed) light beam, said light beam forming a shaped photon-induced THz plasmonic sensing region for sensing the THz response of a small volume sample disposed on or over said support substrate in the vicinity of said plasmonic region.