Ti Alloy Pellicle Frame With Laminated Metal Layer for EUV Dust Discharge
Solution Overview
Problem
EUV exposure systems face challenges with pellicle frames due to limited space, requiring precise processing accuracy and thorough prevention of submicron dust and foreign matter discharge, which conventional methods struggle to address effectively.
Innovation Solution
A pellicle frame made of Ti or Ti alloy with a laminated metal layer having a surface roughness of 0.10 μm or less and a Vickers hardness of 160 or more, designed to immobilize and reinforce irregularities, preventing dust and foreign matter accumulation and facilitating easy cleaning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional Al or Al alloy frame with black anodic oxide coating is used, then lightness and workability are improved, but dust and foreign matter discharge from voids and craters occurs
Solution Approach 1:
The patent applies a multi-layer coating structure consisting of a base anodic oxide layer and an additional dust-prevention coating layer. This composite structure combines the advantages of the original anodic oxide coating (hardness, corrosion resistance) with the dust-prevention properties of the additional layer, effectively preventing dust discharge while maintaining manufacturing feasibility
Solution Approach 2:
The patent applies dust-prevention treatment specifically to the inner surface of the frame where dust accumulation and discharge occur most frequently. This localized treatment approach addresses the harmful effect at the critical location without requiring complete reconstruction of the entire frame structure
2Object-generated harmful factors
If physical polishing and chemical polishing are performed to reduce surface roughness, then dust discharge is reduced, but processing time and complexity increase
Solution Approach 1:
The patent performs dust-prevention coating application as a preliminary action during the manufacturing process, before the frame is assembled and put into service. This preliminary treatment prevents dust accumulation from occurring in the first place, eliminating the need for repeated polishing operations later
Solution Approach 2:
The patent replaces mechanical polishing operations with a chemical/coating-based dust prevention method. Instead of continuously performing mechanical removal of surface irregularities, a coating layer is applied that chemically or physically prevents dust formation and discharge, significantly reducing processing time
3Object-generated harmful factors
If frame surface roughness is reduced to prevent dust accumulation, then cleanliness is improved, but manufacturing complexity increases
Solution Approach 1:
The patent employs a composite coating system where a base layer provides structural integrity and a top layer provides dust-prevention properties. This composite approach achieves the cleanliness requirement through material selection rather than complex manufacturing processes
Solution Approach 2:
The patent changes the surface properties of the frame by applying a coating layer with specific physical and chemical parameters designed to prevent dust accumulation. This parameter change is achieved through controlled coating application processes rather than complex mechanical surface treatment
Data Source
AI summary
The present disclosure provides a pellicle frame and a pellicle including the pellicle frame. The pellicle frame includes a frame base material made of Ti or Ti alloy and a metal layer laminated on a surface of the frame base material.