Titanium-Aluminum Rotary Target Densification by Cold Spray and Laser Shock
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods face challenges in producing large-sized and high-density titanium-aluminum alloy targets due to brittleness, processing difficulties, and exothermic expansion issues, which lead to fractures and non-uniform sputtering, and conventional processes struggle with large-scale equipment development.
Innovation Solution
A method involving a pure-silver coating on a stainless-steel backing tube, followed by vacuum cold spraying of titanium-aluminum deposition layers with laser shock peening, iteratively building up the target to a desired thickness, enhancing material utilization and structural integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional high-current heating method or hot isostatic pressing sintering method is used to prepare large-sized titanium-aluminum alloy targets, then sputtering efficiency is improved, but the targets are prone to fracture due to brittleness and processing difficulty
Solution Approach 1:
The patent changes the fundamental processing parameters by using cold spray deposition instead of thermal sintering methods. This involves depositing titanium and aluminum powders in a vacuum cold spray environment followed by laser shock peening, which fundamentally alters the material processing regime from high-temperature sintering to low-temperature deposition with mechanical shock treatment, thereby achieving large-sized targets without brittleness-induced fracture
Solution Approach 2:
The patent creates a composite structure by depositing titanium and aluminum layers alternately or in specific sequences, forming a multi-layer composite target structure. This composite approach allows each layer to contribute its properties while the overall structure gains enhanced mechanical performance and resistance to fracture under sputtering conditions
2Ease of manufacture
If elemental titanium and aluminum are alloyed using conventional methods, then titanium-aluminum alloy targets can be fabricated, but exothermic expansion produces bubbles and shrinkage cavities resulting in low density
Solution Approach 1:
The patent replaces the conventional thermal alloying process with a mechanical deposition process (cold spray) followed by laser shock peening. Instead of relying on exothermic reactions and thermal sintering that cause expansion and void formation, the method uses kinetic energy of sprayed particles and laser-induced shock waves to densify the material, eliminating bubbles and shrinkage cavities while achieving high density
Solution Approach 2:
The patent performs preliminary vacuum cold spray deposition of titanium and aluminum powders before applying laser shock peening. This preliminary deposition creates a green compact structure that is then densified by the laser shock treatment, preventing the formation of defects before they can occur during final consolidation
3Volume of moving object
If large-sized equipment is developed to prepare large-sized tubular titanium-aluminum rotary targets, then target size is increased, but device complexity and manufacturing difficulty increase
Solution Approach 1:
The patent segments the target fabrication process into distinct stages: vacuum cold spray deposition of titanium powder, cold spray deposition of aluminum powder, and laser shock peening. This segmentation allows each process step to be performed with relatively simple, existing equipment rather than requiring a single complex large-scale sintering system, thereby achieving large target sizes without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method results in a high-density, fine-grained, homogeneous titanium-aluminum metal rotary target with improved adhesive strength and uniform conductivity, enabling large-scale production and extended service life.
Implementation Method 1
preparing a pure-silver coating on a surface of a stainless-steel backing tube by a conventional cold spraying method; depositing a titanium-aluminum deposition layer on a surface of the pure-silver coating by a vacuum cold spraying method
Implementation Method 2
performing laser shock on the deposition layer using a laser shock peening process while depositing the titanium-aluminum deposition layer
Data Source
AI summary
A titanium-aluminum metal rotary target and a preparation method therefor are disclosed, pertaining to the technical field of target materials. The preparation method includes following steps: preparing a pure-silver coating on a surface of a stainless-steel backing tube by a conventional cold spraying method; depositing a titanium-aluminum deposition layer on a surface of the pure-silver coating by a vacuum cold spraying method, and performing laser shock on the deposition layer using a laser shock peening process while depositing the titanium-aluminum deposition layer; and performing the above step iteratively until a total thickness of the titanium-aluminum deposition layers reaches a preset thickness.