Tiled Flexible Stamp Layout for Precise Large-Area Imprinting
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Solution Overview
Problem
Existing large area masters for imprinting micro- and nano-structures are expensive and have poor seam quality due to misalignment and rotation of tiled master units, leading to deteriorated imprint quality and increased costs.
Innovation Solution
A scaled-up master is constructed from tile-shaped units with non-hexagonal shapes, where adjoining edges of neighboring units are parallel and splice lines have junctions with at most three corners meeting, ensuring high position accuracy and improved seam appearance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple master units are tiled together to create large area masters, then the imprinting area is increased, but the alignment accuracy and seam quality deteriorate due to misalignment and rotation of tiled units
Solution Approach 1:
The master is divided into multiple tile-shaped master units that can be assembled together to form a large area master. Each master unit has a specific shape (square, rectangular, triangular, or trapezoidal) with defined edges that facilitate precise alignment when tiled together, allowing the creation of large imprinting areas while maintaining alignment accuracy through controlled junction configurations.
Solution Approach 2:
The master units employ non-hexagonal shapes with specific geometric characteristics (square, rectangular, triangular, or trapezoidal forms) that create asymmetric junction patterns. This asymmetry in shape design ensures that when units are tiled together, the junctions between units have controlled configurations that prevent rotation and misalignment, thereby maintaining manufacturing precision across the assembled large area master.
2Area of stationary object
If multiple master units are tiled together to create large area masters, then the imprinting area is increased, but the seam width increases leading to poor seam appearance and deteriorated imprint quality
Solution Approach 1:
The master is divided into multiple tile-shaped master units with specifically designed edges and junction configurations. By segmenting the master into units with controlled junctions (where edges meet at specific points or lines), the seam width is minimized and seam appearance is improved while still achieving large overall imprinting area through the assembly of multiple units.
3Adaptability or versatility
If traditional tiling methods are used with hexagonal or irregular shapes, then assembly flexibility is improved, but position accuracy and seam appearance deteriorate due to misalignment and rotation
Solution Approach 1:
The master units employ non-hexagonal shapes with specific geometric characteristics (square, rectangular, triangular, or trapezoidal forms) that create asymmetric junction patterns. This asymmetry in shape design ensures that when units are tiled together, the junctions between units have controlled configurations that prevent rotation and misalignment, thereby maintaining manufacturing precision across the assembled large area master.
Data Source
AI summary
The invention relates to a scaled-up master for imprinting of micro- and nano-structures, the master being made-up from a plurality of tile-shaped master units, wherein the plurality of tile-shaped master units making-up the master comprises tile-shaped master units having a non-hexagonal shape wherein adjoining edges of neighbouring master units are parallel with each other and wherein the master units forming the master are arranged such that the splice lines between the master units only have junctions between master units where at most three corners of neighbouring master units are brought together. The invention further relates to a flexible stamp for imprinting of micro- and nano-structures, the flexible stamp being copied from such scaled-up master. Also an imprinted product is claimed which is copied from the flexible stamp.