3D Profile Inspection Tilt Angle Adjustment Mechanism
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Solution Overview
Problem
Existing optical inspecting technologies struggle to capture three-dimensional profiles of miniature structures with large surface slopes, as the reflected light cannot enter the microscope, leading to incomplete profile data and the need for numerical interpolation, which limits precision and accuracy in inspection.
Innovation Solution
A three-dimensional profile inspecting apparatus comprising at least two optical inspecting apparatuses and a tilt angle adjustment mechanism that maintains focus on a single position while adjusting tilt angles, allowing for the capture of images from multiple angles to build a complete profile, even for subjects with large surface slopes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a microscope with magnification ratio less than 20 is used, then the aperture is small and the device is simple, but the reflected light from surfaces with large slopes cannot enter the microscope, making profile inspection impossible
Solution Approach 1:
The patent introduces a tilt angle adjustment mechanism that adds rotational freedom in the optical axis direction, transforming the inspection system from a fixed-orientation microscope to one that can dynamically adjust its viewing angle. This dimensional addition allows the optical axis to tilt and follow the slope of profile surfaces, enabling detection of reflected light from angled surfaces that would otherwise be invisible to a fixed microscope.
Solution Approach 2:
The microscope is equipped with a tilt angle adjustment mechanism that enables dynamic reorientation of the optical axis. Instead of a static inspection system, the microscope can now adapt its orientation in real-time to match the slope of the profile surface being inspected, allowing continuous tracking of reflected light as the profile geometry changes.
2Productivity
If numerical interpolation is used to estimate profile information, then the inspection can be completed, but the actual profile, dimension and roughness data cannot be acquired, reducing measurement precision
Solution Approach 1:
The tilt angle adjustment mechanism proactively positions the optical axis to follow the slope of the profile surface before measurement begins. By pre-aligning the microscope's viewing angle with the expected surface orientation, the system ensures that reflected light from the profile surface enters the objective lens, capturing actual measurement data rather than requiring post-processing interpolation.
Solution Approach 2:
The system uses feedback from the detected profile slope to dynamically adjust the tilt angle of the optical axis. As the microscope detects the angle of the profile surface, it feeds this information back to the tilt adjustment mechanism, which then reorients the optical axis to match the surface slope, ensuring continuous capture of accurate reflected light data for precise measurement.
3Ease of operation
If lateral scanning at single axis is used, then the sample surface must be located within the maximum coherence plane, but the complete profile cannot be obtained if the profile extends beyond this plane, limiting adaptability
Solution Approach 1:
The patent adds the tilt angle dimension to the scanning system, transforming it from single-axis lateral scanning to a two-degree-of-freedom system that combines lateral movement with optical axis tilting. This allows the microscope to access profile regions beyond the original coherence plane by adjusting the viewing angle, effectively expanding the measurable profile range without adding complex mechanical scanning in multiple lateral directions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and accurate measurement of three-dimensional profiles for both simple and complex miniature structures, including nano-applications, by ensuring that the optical inspecting apparatuses remain focused on a single position as they adjust tilt angles, thereby overcoming the limitations of previous technologies.
Implementation Method 1
the reflected light 13 from the subject 12 cannot enter the microscope 11
Data Source
AI summary
A three-dimensional profile inspecting apparatus includes at least two optical inspecting apparatuses and a tilt angle adjusting mechanism. The tilt angle adjusting mechanism is equipped with the at least two optical inspecting apparatuses so as to adjust the tilt angles of the at least two optical inspecting apparatuses. When the tilt angles of the optical inspecting apparatuses are changed, the focuses of the optical inspecting apparatuses remain at a single position and a subject to be inspected is within the fields of view of the optical inspecting apparatuses. The three-dimensional profile of the subject can be obtained by building the images collected by the two optical inspecting apparatuses.