Tilt-Series Imaging with ROI Tracking During Sample Tilting
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Solution Overview
Problem
Traditional charged particle microscopes face challenges in efficiently tracking the field of view during tilt series acquisitions, leading to low signal-to-noise ratio and increased acquisition time, particularly in methods like fast-incremental single-exposure acquisition and continuous tilt tomography.
Innovation Solution
A method and system for charged particle microscopy that includes tracking the position of a sample during tilt angle changes, adjusting the relative position to maintain the region of interest within the field of view, and initiating a recovery process upon detecting anomalies, using image-based feedback and sensor information to ensure accurate image acquisition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If tracking is performed after image capture, then the process is simpler, but the signal-to-noise ratio decreases and tracking reliability fails when imaging dose is low
Solution Approach 1:
The patent applies preliminary action by capturing a preview image before the main tilt series acquisition. This preview image is used to establish initial tracking of the region of interest, allowing the system to predict and compensate for sample drift during the actual data collection. The tracking is initiated in advance based on the preview, ensuring reliability even when subsequent images have low signal-to-noise ratios.
2Reliability
If tracking is performed before main acquisition, then tracking reliability improves, but acquisition time increases significantly
Solution Approach 1:
The patent applies partial action by performing tracking only on a preview image rather than on every image in the tilt series. The tracking parameters derived from the single preview image are then applied throughout the entire acquisition process, eliminating the need for continuous tracking measurements. This reduces the time overhead to minimal while maintaining adequate tracking reliability.
3Productivity
If fast-incremental single-exposure acquisition is used, then acquisition speed increases, but the ability to track field of view decreases
Solution Approach 1:
The patent resolves this contradiction by performing the tracking measurement in advance using a preview image captured before the fast incremental acquisition. The region of interest is identified and tracked parameters are established beforehand, allowing the main acquisition to proceed at high speed without interruption for tracking measurements, while still maintaining field of view tracking precision through the pre-established parameters.
Data Source
AI summary
A method and charged particle microscope for obtaining a tilt series of images based on exposure of a region of interest of a sample to a charged particle beam at a plurality of tilt angles. The method comprises the step of changing the tilt angle at a tilt angle speed while acquiring the tilt series of images. The method further comprises the step of tracking a position of at least a part of the sample during the changing of the tilt angle, and changing, based on the step of tracking the position, the relative position of the sample with respect to the charged particle beam to keep the region of interest within a field of view. As defined herein, the method comprises the steps of starting a recovery process based on a detection of an anomaly in the tracking of the position of the sample.