Tilt Structure for Spectral Sensors
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Solution Overview
Problem
Existing spectral sensors face challenges in miniaturization due to difficulties in manufacturing minute tilt structures, which are costly, require frequent mold replacement, and limit material options, as well as integration with semiconductor elements.
Innovation Solution
A method using semiconductor processing to create a tilt structure with a shaft section and a tilt structure film, where the film is bent to form an acute angle, allowing for low-cost, miniaturized, and versatile tilt structures that can be easily integrated with semiconductor elements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a metal mold is used to manufacture the minute tilt structure, then the tilt structure can be formed with precise geometry, but the manufacturing cost increases due to large initial investment and running costs
Solution Approach 1:
The patent uses a master mold to create replica molds, which are then used for manufacturing the tilt structures. This copying approach eliminates the need for expensive metal molds while maintaining geometric precision, as the replica molds can be easily fabricated from the master mold and used repeatedly without significant wear
Solution Approach 2:
The patent changes the material parameter of the mold from metal to resin or other non-metallic materials. This parameter change reduces the initial investment cost and running costs while still achieving the required manufacturing precision through the replica mold system
2Productivity
If a metal mold is used to manufacture the minute tilt structure, then the tilt structure can be produced efficiently, but the running cost increases due to regular replacement of worn molds
Solution Approach 1:
The patent employs disposable or limited-life replica molds made from inexpensive materials. These molds are replaced when worn, but their low cost means the replacement expense is minimal compared to metal molds. The system achieves high productivity through the use of multiple replica molds that can be manufactured quickly and used efficiently
Solution Approach 2:
The master mold creates multiple replica molds that can be used simultaneously or sequentially, maintaining high productivity while each individual replica mold has low replacement cost
3Manufacturing precision
If a metal mold is used to manufacture the minute tilt structure, then the tilt structure can be formed accurately, but the time required increases due to lengthy metal mold manufacturing process
Solution Approach 1:
The patent creates a master mold with the precise geometry in advance, which then serves as a template for producing multiple replica molds. This preliminary action of creating the master mold allows subsequent replica molds to be fabricated quickly without repeating the precise geometry creation process, significantly reducing the time required for each production batch while maintaining accuracy
4Stability of the object's composition
If a metal mold is used to manufacture the minute tilt structure, then the tilt structure can be produced with consistent quality, but the material selection is limited to materials compatible with metal molding
Solution Approach 1:
The replica mold system is designed to be universal, capable of producing tilt structures from various materials including resins, polymers, and other materials that can be molded using the replica mold process. This universality maintains quality consistency through the standardized mold interface while enabling versatile material selection
5Volume of moving object
If the metal mold size is reduced for miniaturization, then the tilt structure can be miniaturized, but the manufacturing becomes more difficult due to metal mold miniaturization limitations
Solution Approach 1:
The replica mold copying process can be scaled to produce molds of any size, including very small sizes for miniaturized tilt structures. The copying technique itself is not constrained by size in the same way metal molding is, allowing easy fabrication of miniaturized replica molds from the master mold pattern
Data Source
AI summary
A tilt structure includes a shaft section formed on a substrate section, a tilt structure film having one end formed on an upper surface of the shaft section, and the other end bonded to the substrate section, and a thin film section provided to the tilt structure film, located on a corner section composed of the upper surface of the shaft section and a side surface of the shaft section, and having a film thickness thinner than the tilt structure film, the tilt structure film is bent in the thin film section, and an acute angle is formed by the substrate section and the tilt structure film.