Tiltable MEMS Lens on SOI Substrate for Compact Zoom
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Solution Overview
Problem
Integration of a movable lens into hand-held or portable electronic devices is hindered by the large volume and high power consumption of traditional drive mechanisms, which are unsuitable for compact systems like cellular phones requiring high fidelity optical systems with variable focal lengths or zoom positions.
Innovation Solution
A tiltable micro-electro-mechanical system (MEMS) lens is designed using a semiconductor-on-insulator (SOI) substrate with a microscopic lens and semiconductor rim, where electrical bias between the lens rim and horizontal semiconductor beams allows for tilting of the lens to alter the optical path, enabling a compact and power-efficient solution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If traditional drive mechanisms (electrical motors) are used to move the lens, then sufficient power is generated to overcome mechanical frictions and gravitational forces, but the volume occupied is large and power consumption is significant
Solution Approach 1:
The patent replaces the traditional electrical motor (macroscopic mechanical system) with a MEMS-based electrostatic actuation system. The microlens is integrated directly onto a semiconductor substrate with electrostatic actuators that use electrical fields to generate mechanical motion at the micro-scale, eliminating the need for bulky motors while maintaining the capability to move the lens for optical path manipulation.
Solution Approach 2:
The drive mechanism is segmented into multiple microscopic electrostatic actuators distributed across the semiconductor substrate beneath the microlens. Instead of using a single centralized motor, the system employs distributed micro-actuators that work together to achieve lens positioning, significantly reducing the overall volume required for the drive mechanism.
2Power
If traditional drive mechanisms (electrical motors) are used to move the lens, then sufficient power is generated to overcome mechanical frictions and gravitational forces, but power consumption is significant
Solution Approach 1:
The patent replaces the traditional electrical motor (macroscopic mechanical system) with a MEMS-based electrostatic actuation system. The microlens is integrated directly onto a semiconductor substrate with electrostatic actuators that use electrical fields to generate mechanical motion at the micro-scale, eliminating the need for bulky motors while maintaining the capability to move the lens for optical path manipulation.
Solution Approach 2:
The system changes the operating parameters from macroscopic motor rotation and mechanical force generation to microscopic electrostatic field generation. By operating at the micro-scale with electrostatic fields, the system achieves lens actuation with significantly lower power consumption compared to traditional motors, while still generating sufficient force to overcome friction and gravity at the micro-scale.
3Volume of moving object
If the size of traditional mechanisms is reduced to fit compact dimensions, then the system becomes suitable for portable devices, but the capability to generate sufficient power and overcome friction is compromised
Solution Approach 1:
The patent replaces the traditional electrical motor (macroscopic mechanical system) with a MEMS-based electrostatic actuation system. The microlens is integrated directly onto a semiconductor substrate with electrostatic actuators that use electrical fields to generate mechanical motion at the micro-scale, eliminating the need for bulky motors while maintaining the capability to move the lens for optical path manipulation.
Solution Approach 2:
The patent transitions from three-dimensional macroscopic motor components to two-dimensional planar electrostatic actuators fabricated on a semiconductor substrate. This dimensional reduction allows the drive mechanism to be flattened and integrated beneath the microlens, achieving compact form factor while maintaining actuation capability through the planar configuration of the electrostatic fields.
4Volume of moving object
If the size of traditional mechanisms is reduced to fit compact dimensions, then the system becomes suitable for portable devices, but the capability to generate sufficient power and overcome friction is compromised
Solution Approach 1:
The patent replaces the traditional electrical motor (macroscopic mechanical system) with a MEMS-based electrostatic actuation system. The microlens is integrated directly onto a semiconductor substrate with electrostatic actuators that use electrical fields to generate mechanical motion at the micro-scale, eliminating the need for bulky motors while maintaining the capability to move the lens for optical path manipulation.
Solution Approach 2:
The patent transitions from three-dimensional macroscopic motor components to two-dimensional planar electrostatic actuators fabricated on a semiconductor substrate. This dimensional reduction allows the drive mechanism to be flattened and integrated beneath the microlens, achieving compact form factor while maintaining actuation capability through the planar configuration of the electrostatic fields.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tiltable MEMS lens effectively alters the optical path through electrostatic force, enabling a compact and high-fidelity optical system with variable focal lengths, suitable for integration into portable devices without the need for large drive mechanisms.
Implementation Method 1
The microlens may be tilted by electrostatic force to a continuum of positions to alter a path of an optical beam
Data Source
AI summary
A tiltable micro-electro-mechanical (MEMS) system lens comprises a microscopic lens located on a front surface of a semiconductor-on-insulator (SOI) substrate and a semiconductor rim surrounding the periphery of the microscopic lens. Two horizontal semiconductor beams located at different heights are provided within a top semiconductor layer. The microscopic lens may be tilted by applying an electrical bias between the lens rim and one of the two semiconductor beams, thereby altering the path of an optical beam through the microscopic lens. An array of tiltable microscopic lenses may be employed to form a composite lens having a variable focal length may be formed. A design structure for such a tiltable MEMS lens is also provided.