Tiltable Platform for Additive Manufacturing Polishing Pads
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Solution Overview
Problem
Chemical mechanical polishing processes face challenges in achieving uniformity, as different areas of a substrate can be polished at varying rates, leading to over- or under-polishing, and existing polishing pad manufacturing methods lack precision in forming pads with tight tolerances and multiple material characteristics.
Innovation Solution
An additive manufacturing apparatus with a platform, actuator system, and sensing system that adjusts the platform tilt based on detected surface heights to ensure horizontal alignment, and multiple printheads that dispense and cure layers of feed material to form polishing pads with precise thickness and material properties, including the use of multiple energy sources for simultaneous curing of exterior and interior surfaces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional molding or casting methods are used to manufacture polishing pads, then production simplicity is maintained, but manufacturing precision and thickness uniformity deteriorate
Solution Approach 1:
The polishing pad is manufactured layer by layer through additive processes, with each layer being precisely controlled independently. This segmentation allows for tight thickness tolerances while maintaining processability through automated layer-by-layer construction
Solution Approach 2:
The invention uses variable parameter control in the additive manufacturing process, including adjustable platform tilt angles, controlled feed material deposition rates, and precise curing parameters. These parameter changes enable manufacturing of pads with tight thickness tolerances while managing process complexity through automation
2Manufacturing precision
If the platform is kept fixed during additive manufacturing, then device complexity is reduced, but manufacturing precision of thickness tolerances deteriorates
Solution Approach 1:
The platform is made dynamically adjustable with tilt control during the additive manufacturing process. This dynamic adjustment allows the platform to be tilted to compensate for feed material accumulation or depletion, maintaining precise layer thickness control while managing device complexity through controlled motion
Solution Approach 2:
The system uses feedback control where the platform tilt is adjusted based on detected variations in feed material surface height. This feedback mechanism maintains layer thickness precision by continuously compensating for material deposition variations through automated platform repositioning
3Manufacturing precision
If error conditions are detected during printing, then product quality is improved by stopping, but productivity deteriorates due to production interruptions
Solution Approach 1:
The system performs preliminary detection of error conditions during the printing process and implements corrective actions proactively. By detecting issues early and responding with automated corrections rather than stopping, the system maintains both product quality and production throughput
Solution Approach 2:
The system maintains continuous production by implementing error handling that allows printing to continue despite detected error conditions. Through automated compensation and correction mechanisms, useful action continues without interruption, maintaining both quality and productivity
4Productivity
If single-energy source curing is used, then device complexity is reduced, but productivity deteriorates due to sequential curing requirements
Solution Approach 1:
Multiple energy sources are merged into a single curing system that operates simultaneously. This combination of multiple energy sources enables parallel curing of different regions or aspects of the feed material, significantly increasing curing throughput while managing device complexity through integrated control
Solution Approach 2:
The multi-energy source system enables continuous and simultaneous curing operations, eliminating sequential curing steps. This continuous parallel action increases productivity by curing multiple areas at once while the integrated system manages the complexity of coordinating multiple energy sources
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures improved fidelity and layer-by-layer thickness tolerances, allows for continuous printing without stopping due to error conditions, and enhances throughput by selectively curing feed material, enabling the formation of polishing pads with tight tolerances and multiple material characteristics.
Implementation Method 1
a sensing system to detect a height of a surface on or above the platform at each of a plurality of horizontally spaced points
Implementation Method 2
an actuator system coupled to the platform to adjust a tilt of the platform
Implementation Method 3
one or more printheads supported above the platform, the one or more printheads configured to dispense successive layers of feed material on the platform
Implementation Method 4
enables the formation of polishing pads with tight tolerances and multiple material characteristics
Data Source
AI summary
An additive manufacturing apparatus for forming a polishing pad for chemical mechanical polishing includes a platform, an actuator system coupled to the platform to adjust a tilt of the platform, one or more printheads supported above the platform, the one or more printheads configured to dispense successive layers of feed material on the platform to be form the polishing pad, a sensing system to detect a height of a surface on or above the platform at each of a plurality of horizontally spaced points, and a controller configured to selectively operate the actuator system to adjust the tilt of the platform based on the detected height of the platform at each of the points such that the surface is moved closer to horizontal.