Tiltable Showerhead Azimuthal Non-Uniformity Control

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Solution Overview

Problem

Double patterning atomic layer deposition processes face challenges in reducing azimuthal non-uniformities, which lead to increased critical dimension imbalance and poor yield, as existing methods are inadequate in tuning these non-uniformities effectively.

Innovation Solution

A method and system where a tiltable showerhead in a processing chamber is adjusted to specific tilted positions based on data correlation with azimuthal non-uniformities, performing trim steps to minimize these non-uniformities and subsequently depositing a spacer layer, utilizing a controller to determine and implement the optimal tilted position for the showerhead.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional fixed-position showerhead is used in the trim step, then the process is simple and easy to operate, but azimuthal non-uniformities increase leading to critical dimension imbalance

Engineering Contradiction:

Improvecritical dimension uniformityVSAvoidshowerhead positioning system

Core Design Contradiction:

Manufacturing precisionVSDevice complexity

Solution Approach 1:

The showerhead is made tiltable relative to the substrate support, allowing dynamic adjustment of its angular position. The showerhead can be tilted to different angular positions (e.g., 0 degrees, 45 degrees, 90 degrees) to optimize the trim step and reduce azimuthal non-uniformities in critical dimension measurements

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The angular position of the showerhead is changed as a process parameter to control the direction and distribution of gas flow during the trim step. By adjusting the tilt angle, the process optimizes etch uniformity across the substrate surface, specifically addressing azimuthal variations

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If the showerhead position is adjusted to reduce azimuthal non-uniformities, then critical dimension uniformity improves, but the process time and data collection requirements increase

Engineering Contradiction:

Improveazimuthal non-uniformity reductionVSAvoiddata collection and showerhead adjustment time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The optimal showerhead tilt angle is determined in advance through data collection and analysis. The system collects critical dimension data at various angular positions, identifies the optimal angle that minimizes azimuthal non-uniformities, and stores this information for use in subsequent production runs

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system uses measured critical dimension data to provide feedback on showerhead positioning effectiveness. By analyzing the relationship between angular position and azimuthal non-uniformities, the system automatically determines and applies the optimal tilt angle to minimize variations

Inventive Principle:

Principle #23Feedback

Data Source

PatentUS11078570B2Azimuthal critical dimension non-uniformity for double patterning process

Publication Date: 2021.08.03 LAM RES CORP

AI summary

A method for adjusting a position of a showerhead in a processing chamber includes arranging a substrate that includes a plurality of mandrels on a substrate support in the processing chamber and adjusting a position of the showerhead relative to the substrate support. Adjusting the position of the showerhead includes adjusting the showerhead to a tilted position based on data indicating a correlation between the position of the showerhead and azimuthal non-uniformities associated with etching the substrate. The method further includes, with the showerhead in the tilted position as adjusted based on the data, performing a trim step to etch the plurality of mandrels.