Tiltable Substrate Carrier for Vacuum Deposition
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Solution Overview
Problem
The challenge in industrializing the GLAD method for multilayer deposition lies in precisely controlling the movement of large optical parts within a vacuum chamber without opening it, particularly for lenses or windows, due to mechanical and electrical drive complexities and heat dissipation issues in a vacuum environment.
Innovation Solution
A compact, autonomous module with integrated motorization for substrate maneuvering, featuring low-voltage micro-servomotors and radio communication for remote control, allowing precise rotation and inclination of substrates within the vacuum chamber, while isolating electronic components from high temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If out-of-cavity motors are used for maneuvering the revolving supports, then the maneuvering capability is provided, but excessive strains occur on the motors
Solution Approach 1:
The patent replaces out-of-cavity motors with integrated in-cavity motorization. Each substrate carrier incorporates its own motor (first motor for rotation about first axis, second motor for rotation about second axis) directly within the vacuum chamber, eliminating the need for external motors and their associated mechanical linkages that would experience excessive strains.
2Ease of operation
If wired control through the chamber wall is implemented, then control is established, but the system becomes too complex when several robotic devices are present
Solution Approach 1:
The patent extracts the control system from the external environment by integrating wireless communication capabilities directly into each substrate carrier. The carriers include radio transmission/reception electronics that enable autonomous control without wired connections through the chamber wall, thereby simplifying the overall control architecture even when multiple devices are present.
3Ease of operation
If maneuvering devices operate in a vacuum chamber, then substrate manipulation is achieved, but heat dissipation by convection becomes impossible
Solution Approach 1:
The patent segments the system into electrically isolated components within the vacuum chamber. Each substrate carrier is an independent unit with its own motorization and control electronics, allowing for distributed heat management. The electric isolation barriers between components prevent thermal coupling while maintaining functional independence, addressing the heat dissipation challenge in vacuum conditions.
4Ease of operation
If the chamber is opened for intermediate treatments, then substrate access is provided, but moisture ingress occurs
Solution Approach 1:
The patent enables continuous multilayer deposition operations by integrating all necessary maneuvering and control functions within the vacuum chamber. The substrate carriers can be tilted and rotated in-situ without breaking vacuum, allowing uninterrupted deposition of multiple layers. This eliminates the need to open the chamber between treatment steps, maintaining vacuum integrity and preventing moisture ingress.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient, precise, and uniform multilayer deposition on multiple substrates simultaneously, maintaining vacuum continuity and avoiding moisture ingress, suitable for series production of optical parts with high thermal protection and flexibility in substrate size and orientation.
Implementation Method 1
a first motor for maneuvering said support in rotation about a first axis parallel to the plate
Implementation Method 2
a second motor for maneuvering said support in rotation about a second axis at right angles to said support
Implementation Method 3
radio transmission/reception electronics, a processor board, motor control electronics and a power supply battery for the module, the processor board comprising a program memory comprising a driver program for the motor control electronics based on data received from a remote device provided with a radio transmitter/receiver device for communication with the transmission/reception electronics of the module
Data Source
AI summary
A module for operating a carrier of one or more substrates to be treated in a vacuum deposition method includes a frame provided with a plate receiving, on a first side, an electronic assembly comprising radio transmitter/receiver electronics, a processor card, motor controller electronics and a battery for supplying power to the module. The processor card has a program memory with a program for controlling the motor controller electronics according to data received from a remote apparatus provided with a radio transmitting/receiving device for communicating with the module's radio transmitter/receiver electronics and, on a second side, a device for operating the carrier, which device is provided with a first motor for rotating the carrier about a first axis parallel to the plate and with a second motor for rotating the carrier about a second axis perpendicular to the plate.