3D X-ray Imaging System with Tilted Beam Geometry
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Solution Overview
Problem
Existing 3D x-ray imaging systems face challenges in achieving high throughput and image quality, particularly for laterally extended objects, due to limitations in focus-object distance (FOD) and radiation hardening artifacts.
Innovation Solution
A 3D x-ray imaging system is designed with a position-sensitive x-ray detector and an x-ray source featuring a diverging beam and a transmissive vacuum window, allowing for a small FOD and improved spatial resolution. The system includes a sample motion stage for rotating the object and a sample mount with high x-ray transmission, optimizing image acquisition and reconstruction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the focus-object distance (FOD) is reduced to increase x-ray flux and improve throughput, then imaging throughput is improved, but the object and x-ray source physically interfere with each other
Solution Approach 1:
The patent introduces a tilted x-ray beam geometry where the beam axis is angled relative to the object surface, creating a new spatial dimension for imaging. This allows the x-ray source to be positioned closer to the object without physical interference, as the tilted beam path clears the object surface. The sample stage rotates the object about an axis perpendicular to the beam direction, enabling tomographic data collection from multiple angles while maintaining the optimized small FOD configuration.
2Reliability
If conventional tomography or laminography is used for laterally extended objects, then the object can be imaged, but radiation hardening and photon starvation artifacts occur due to varying transmitted x-ray spectrum
Solution Approach 1:
The patent applies local quality by using a tilted beam geometry that ensures more uniform x-ray transmission through different regions of the object. The tilt angle is specifically chosen to optimize the path length through the object across the field of view, reducing variations in transmitted spectrum. This localized optimization of beam angle minimizes radiation hardening and photon starvation artifacts in critical regions while maintaining overall image quality.
3Measurement precision
If the x-ray source size is reduced to improve spatial resolution, then image resolution is improved, but x-ray flux decreases
Solution Approach 1:
The patent employs asymmetric beam geometry where the x-ray beam is tilted at a specific angle relative to the object surface. This asymmetric configuration allows a larger effective source size to be used without compromising spatial resolution in the critical imaging plane. The tilt angle is optimized to maintain sharp edges and high resolution while increasing the total x-ray flux by utilizing a larger source area that would otherwise cause geometric unsharpness in conventional symmetric geometries.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves increased imaging throughput, improved image quality, and higher resolution in planes parallel to the surface of laterally extended objects, addressing the limitations of prior art systems.
Implementation Method 1
The x-ray source is configured to produce diverging x-rays, at least some of the diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending from the x-ray source, through the region of interest of the object, to the at least one active element of the at least one position-sensitive x-ray detector
Implementation Method 2
The x-ray source comprises an x-ray transmissive vacuum window having an outer surface
Implementation Method 3
at least one sample motion stage configured to rotate the object about a rotation axis
Data Source
AI summary
A three-dimensional x-ray imaging system includes at least one detector and an x-ray source including an x-ray transmissive vacuum window. The x-ray source is configured to produce diverging x-rays emerging from the vacuum window and propagating along an x-ray propagation axis extending through a region of interest of an object to the at least one detector. The diverging x-rays have propagation paths within an angular divergence angle greater than 1 degree centered on the x-ray propagation axis. The system further includes at least one sample motion stage configured to rotate the object about a rotation axis. The system further includes a sample mount configured to hold the object and comprises a first portion in the propagation paths of at least some of the diverging x-rays and having an x-ray transmission greater than 30% for x-rays having energies greater than 50% of a maximum x-ray energy of an x-ray spectrum of the diverging x-rays.