Tilted Chromameter for Nano Projection Structure Inspection
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Solution Overview
Problem
Conventional optical inspection methods are limited in detecting microscale defects on metal surfaces with nano projection structures, and scanning electron microscopes have a small inspection range and may require surface destruction.
Innovation Solution
A nano projection structure inspection apparatus and method using an inspection light irradiation part and a chromameter with a tilted imaging optical axis to receive diffusion reflection light, allowing for efficient inspection of nano projection structures on metal surfaces without damaging the surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional optical inspection method is used, then inspection speed is high, but inspection precision for nanoscale structures is insufficient
Solution Approach 1:
The patent changes the observation parameter from direct reflection to diffusion reflection by tilting the imaging optical axis. This parameter change enables the detection of nanoscale projection structures while maintaining efficient inspection speed, resolving the contradiction between inspection precision and productivity
2Measurement precision
If scanning electron microscope is used, then inspection precision is high, but inspection range is very small
Solution Approach 1:
The patent creates an optical inspection system that can inspect nanoscale structures, making the optical inspection method universal for both microscale and nanoscale defects. This eliminates the need to switch to SEM for nanoscale inspection, thereby expanding the effective inspection range while maintaining high inspection speed
3Measurement precision
If cross section observation is performed, then inspection precision is high, but surface destruction occurs
Solution Approach 1:
The patent replaces the mechanical cross-section cutting method with an optical observation method using diffusion reflection. This substitution allows inspection of the nanoscale projection structures on the surface without any mechanical contact or surface destruction, achieving both high precision and surface preservation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method provides higher correlation between imaging results and nano projection structure shapes, enabling precise inspection of nano projection structures on metal surfaces with improved efficiency and without surface destruction.
Implementation Method 1
The inspected surface causes reflection light from the inspection light, to have the reflection light contain regular reflection light and diffusion reflection light
Data Source
AI summary
A nano projection structure inspection apparatus herein disclosed includes an inspection light irradiation part and a chromameter. The inspection light irradiation part irradiates inspection light to an inspected surface being a surface of a metal. An imaging optical axis of an imaging element of the chromameter is arranged to be tilted to a regular reflection direction of the inspection light caused by the inspected surface. The chromameter makes the imaging element receive diffusion reflection light, among reflection light of the inspection light from the inspected surface, the reflection light containing regular reflection light and the diffusion reflection light, so as to inspect a nanoscale projection structure on the inspected surface.