Tilted Detector for Tapered Wall Surface Inspection
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Solution Overview
Problem
The surface quality of tapered walls in bores on glass plates of transmissive liquid lenses can vary due to mold lifetime and manufacturing position, making nondestructive inspection and quality control challenging for liquid lenses production.
Innovation Solution
A system comprising a stage, detector, and measuring device that tilts at specific angles to measure light reflected from tapered walls, determining characteristics such as surface roughness and defects, allowing for nondestructive evaluation of tapered structures on substrates with nanometer-scale resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional inspection methods are used for tapered wall surface quality, then the manufacturing process can proceed, but the measurement precision and detection capability for nanometer-scale surface irregularities are insufficient
Solution Approach 1:
The patent transforms the measurement problem from a direct frontal approach to an angular approach by tilting the detector at a specific angle (e.g., 45 degrees) relative to the tapered wall. This angular dimension allows the measurement beam to intersect the tapered wall at an optimized angle, enhancing the detection of nanometer-scale surface irregularities through improved light reflection patterns and interference signals.
Solution Approach 2:
The patent changes the measurement parameters by adjusting the detector tilt angle to match the tapered wall geometry. By setting the detector angle based on the tapered wall angle (e.g., if the tapered wall has a 30-degree angle, the detector is tilted at a corresponding angle), the system optimizes the measurement conditions to achieve nanometer-scale precision for surface roughness, linearity, and defect detection.
2Productivity
If nondestructive measurement methods are implemented, then the substrate can be reused and productivity improves, but the device complexity increases due to precise angle requirements
Solution Approach 1:
The patent establishes a direct relationship between the tapered wall angle and the detector tilt angle, creating a scalable parameter system. Once the angle relationship is determined for a specific tapered structure, the same angular parameter can be applied to multiple substrates and tapered walls, simplifying the measurement process across production batches while maintaining nanometer-scale precision.
Solution Approach 2:
The patent creates a universal measurement approach that can inspect multiple tapered structures on a single substrate and across different substrates by using the same detector tilt angle principle. This multi-functional capability allows the system to handle various tapered wall geometries (different angles, sizes) through a single standardized measurement protocol, enhancing productivity without proportionally increasing device complexity.
3Measurement precision
If the detector measures at 90 degrees to the tapered wall, then the surface quality characteristics can be accurately determined, but the detector must be tilted at specific angles increasing the device complexity
Solution Approach 1:
The patent transforms the fixed 90-degree measurement requirement into a flexible angular parameter system. Instead of always measuring at 90 degrees to the surface, the detector is tilted at a specific angle relative to the substrate plane, which results in 90-degree measurement geometry relative to the tapered wall surface. This parameter transformation simplifies the overall device configuration while maintaining measurement precision.
Solution Approach 2:
The patent introduces asymmetric detector positioning relative to the substrate, where the detector is tilted at a specific angle (e.g., 45 degrees) rather than being perpendicular to the substrate plane. This asymmetric configuration is optimized to achieve symmetric 90-degree measurement geometry relative to the tapered wall surface, resolving the apparent contradiction between detector orientation and measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-throughput, nondestructive measurement of surface quality parameters, improving the manufacturing process control and quality assurance for liquid lenses by identifying and correcting surface irregularities.
Implementation Method 1
The detector can be tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall
Data Source
AI summary
A system includes a stage, a detector and a measuring device. The stage is configured to hold a substrate. The substrate includes a plurality of tapered structures, and each of the plurality of tapered structures includes a tapered wall between first and second openings at opposite ends of the plurality of tapered structures. The detector is tilted at a first angle and configured to measure light reflected from the tapered wall at about 90 degrees to the tapered wall. The first angle depends at least in part a second angle between the tapered wall and a longitudinal axis running through the tapered structure. The measuring device is configured to determine a characteristic of the tapered wall and whether the characteristic of the tapered wall is above or below a threshold.