Tilted Grating Structures for Phase-Contrast Imaging

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Solution Overview

Problem

Phase-contrast imaging systems, particularly in cone-beam geometry, suffer from strong distortions outside the center of the field of view due to non-focused grating structures, which limit the effectiveness of X-ray differential phase-contrast imaging.

Innovation Solution

The development of a grating structure with tilted trenches, where each trench is angled slightly more than the previous one, and a combination of laser writing and etching processes to create focused, smooth trench walls, allowing for precise alignment and reduced phase-contrast distortions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional non-focused grating structures are used, then the imaging system can be simpler to manufacture, but strong phase-contrast distortions occur outside the center of the field of view

Engineering Contradiction:
Improveimage qualityVSAvoidgrating structure complexity
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent applies local quality by varying the trench tilt angles across different regions of the grating structure. Each trench is tilted by a specific angle relative to the primary axis, with the tilt angle varying systematically to create a focused geometry that compensates for cone-beam distortions at different field of view positions. This local variation in geometric properties (tilt angles) enables distortion correction while maintaining manufacturing feasibility through systematic patterning.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs asymmetry by introducing non-uniform tilt angles for different trenches rather than using a symmetric, uniform grating structure. The asymmetric tilt configuration creates a focused geometry that redirects X-rays from different angles to converge at appropriate detector positions, thereby correcting phase-contrast distortions. This asymmetric design is achieved through controlled variations in trench orientation while maintaining overall structural regularity for manufacturability.

Inventive Principle:
Principle #4Asymmetry

2Manufacturing precision

If tilted trenches with varying angles are implemented, then phase-contrast distortions are reduced and focused geometry is achieved, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvetrench alignment precisionVSAvoidgrating fabrication complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-calculating and pre-defining the specific tilt angles for each trench before fabrication. The tilt angle for each trench is determined in advance based on its position and the desired focusing geometry, allowing the complex angled structure to be manufactured systematically. This preliminary design stage enables the subsequent fabrication process to follow a predetermined pattern, reducing actual manufacturing complexity despite the sophisticated final structure.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by systematically varying the tilt angle parameter across different trenches. Instead of maintaining a constant trench orientation, the tilt angle is changed as a function of trench position to achieve the desired focused geometry. This controlled parameter variation allows the grating to correct distortions at multiple field of view positions while maintaining a regular, manufacturable structure through predictable parameter progression.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If smooth trench walls are achieved through laser writing and etching, then image quality improves, but the manufacturing process time increases

Engineering Contradiction:
Improvetrench surface smoothnessVSAvoidgrating production rate
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent applies mechanics substitution by replacing traditional mechanical drilling or simple etching methods with a combination of laser writing and chemical etching processes. The laser writing step creates precise trench paths with controlled profiles, followed by etching that smooths the trench walls through chemical action rather than mechanical removal. This substitution of mechanical processes with optical and chemical processes achieves superior surface smoothness and dimensional precision while maintaining reasonable production rates through non-contact and chemically-efficient methods.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables improved image quality by reducing phase-contrast distortions and allowing operation in focused geometry, enhancing the effectiveness of phase-contrast imaging systems, especially in cone-beam geometries, and enabling higher energy applications without increasing physical aspect ratios.

Implementation Method 1

writing, with a laser beam, a first trench or trench structure into a wafer material

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

optimizing of the geometry / finishing by smoothing surfaces of the written first trench by etching

Methodology Applied
Scientific EffectEtching:

Data Source

PatentEP2443491B1Tilted gratings and method for production of tilted gratings
Publication Date: 2020.03.04 PHILIPS INTPROP & STANDARDS GMBH
  • EP2443491B1 patent drawingFigure 1a~1b
  • EP2443491B1 patent drawingFigure 1c~2
  • EP2443491B1 patent drawingFigure 3

AI summary

The present invention relates to phase-contrast imaging which visualizes the phase information of coherent radiation passing a scanned object. Focused gratings are used which reduce the creation of trapezoid profile in a projection with a particular angle to the optical axis. A laser supported method is used in combination with a dedicating etching process for creating such focused grating structures.