Tilted Optical Functional Structure for Reflection Avoidance
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Solution Overview
Problem
Optical devices with protective structures suffer from disturbing reflections of electromagnetic radiation due to the parallel alignment of the cap and chip surfaces, which affects the functionality of devices like scanner mirrors and light modulators, especially when the radiation is both coupled in and out.
Innovation Solution
The optical functional structure is arranged in a tilted manner relative to the protective structure, utilizing a bimorph element or external mechanisms to achieve this tilt, ensuring that the main beam path of electromagnetic radiation interacts with the optical device at an angle relative to the sub-beam path reflected on the protective structure, thereby minimizing reflections.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the cover glass and protective structure are aligned parallel to the chip surface, then the device structure is simple and manufacturing is easier, but disturbing reflections occur that affect device functionality
Solution Approach 1:
The patent applies asymmetry by tilting the optical functional structure relative to the protective structure, breaking the parallel symmetry that causes reflections. The optical functional structure is arranged at an angle such that reflected beams are directed outside the operating range, eliminating the harmful reflection effect while maintaining a relatively simple manufacturing process.
2Object-affected harmful factors
If the optical functional structure is tilted to avoid reflections, then disturbing reflections are reduced, but the device structure becomes more complex
Solution Approach 1:
The patent merges the tilt function into the optical functional structure itself, integrating the reflection avoidance capability directly into the optical element rather than adding a separate component. The optical functional structure is designed to be tilted relative to the protective structure, combining the optical function with the reflection control function in a single integrated approach.
3Reliability
If individual chips are packaged separately with protective structures, then each chip is protected, but the manufacturing process becomes more complicated and costly
Solution Approach 1:
The patent applies universality by designing a protective structure that can be applied to multiple chips simultaneously as a common cap, rather than individual protective structures for each chip. The protective structure serves multiple functions: protecting multiple chips from contamination, providing a common sealing environment, and enabling wafer-level packaging that simplifies the manufacturing process while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces disturbing reflections, enhancing the performance of optical devices by ensuring that reflected beams are directed outside the operating range, thus improving image quality and functionality, particularly in applications like image projection where residual reflections were previously a major issue.
Implementation Method 1
utilizing a bimorph element or external mechanisms to achieve this tilt
Implementation Method 2
a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected on the protective structure
Data Source
AI summary
An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.


