Piezo-resistive Sensor with Tilted Substrate for Force Detection
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Solution Overview
Problem
Existing electronic monitoring devices embedded in solid structures, such as bridges and buildings, face challenges in accurately detecting vertical and lateral mechanical stresses due to sensitivity issues and interference from other force components, leading to inaccurate measurements.
Innovation Solution
An integrated electronic device with a substrate and sensors configured to detect forces using a piezo-resistive effect, where the sensor is positioned on a substrate with a planar face tilted at a specific angle to reduce lateral stress and enhance sensitivity to forces in a predetermined direction, allowing separate measurement of vertical and lateral components.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional piezo-resistive sensors are used to detect mechanical stress, then the sensor can measure force intensity, but the measurement includes unwanted contributions from both vertical and lateral force components, reducing measurement precision
Solution Approach 1:
The patent applies local quality by creating an asymmetric stress distribution pattern on the sensor surface. Specifically, the sensor is designed with a first region that experiences compressive stress and a second region that experiences tensile stress when force is applied in the predetermined direction. This localized differentiation of stress types and directions allows the sensor to selectively detect forces in the desired direction while rejecting lateral components, thereby improving measurement precision by filtering out harmful interference.
2Reliability
If the sensor is embedded in solid structure, then the device can monitor structural health, but the sensor is subjected to high pressures and environmental wear that damage the system over time
Solution Approach 1:
The patent implements beforehand cushioning by providing a protective housing that encloses the sensor before it is embedded in the solid structure. This housing acts as a protective barrier that shields the sensor from high pressures and water infiltrations that would otherwise damage the system over time. The sensor is transferred in a sealed container and embedded while protected, ensuring long-term reliability in harsh environmental conditions.
3Measurement precision
If multiple sensors are used to detect different force components, then measurement accuracy improves, but device complexity increases
Solution Approach 1:
The patent applies universality by designing a single sensor that can detect forces in multiple directions simultaneously. The sensor is configured with regions that respond to forces applied in different directions, allowing one sensor to perform the function of multiple sensors. This multi-functional approach maintains measurement precision for detecting different force components while avoiding the complexity of implementing multiple separate sensors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves accurate detection of forces in specific directions by minimizing interference from other force components, improving measurement accuracy and reliability in monitoring solid structures.
Implementation Method 1
at least one sensor configured to detect said local parameter at least in said predetermined direction with a piezo-resistive effect
Data Source
AI summary
The integrated electronic device is for detecting a local parameter related to a force experienced in a predetermined direction within a solid structure. The device includes a semiconductor substrate having a substantially planar region that defines a plane substantially perpendicular to the predetermined direction. At least one sensor detects the local parameter at least in the predetermined direction with a piezo-resistive effect. At least one substantially planar face is arranged in a portion of the integrated electronic device, the face belonging to a inclined plane by a predetermined angle relative to the plane perpendicular to the predetermined direction, which plane is defined by the substantially planar region of the substrate. The predetermined angle is defined such as to reduce forces acting in directions other than the predetermined direction at the portion of the device around the at least one sensor.