Tilted Wavelength Variable Unit for Illumination Apparatus
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in maintaining the performance and durability of light sources due to reflected light from wavelength variable units, which can increase the temperature and degrade the light source's performance and durability.
Innovation Solution
The illumination apparatus includes a wavelength variable unit tilted with respect to the plane perpendicular to the optical axis, preventing reflected light from being incident on the light source, thereby reducing degradation and maintaining performance and durability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If the wavelength variable unit is positioned perpendicular to the optical axis, then the light transmission efficiency is maximized, but the reflected light returns to the light source causing temperature increase and performance degradation
Solution Approach 1:
The wavelength variable unit is tilted at a specific angle (e.g., 45 degrees) relative to the optical axis, breaking the symmetric perpendicular configuration. This asymmetric positioning causes reflected light to deviate from the optical path and not return to the light source, thereby preventing temperature increase and performance degradation while maintaining acceptable light transmission efficiency
2Reliability
If the wavelength variable unit is tilted to prevent reflected light from returning to the light source, then the light source durability is improved, but the light transmission efficiency may be reduced
Solution Approach 1:
The optimal tilt angle of the wavelength variable unit is carefully selected (e.g., 45 degrees) to balance two competing requirements: tilting sufficiently to prevent reflected light from returning to the light source, while tilting not so much as to excessively reduce light transmission efficiency. This parameter optimization resolves the contradiction between light source durability and transmission efficiency
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively reduces the incidence of reflected light on the light source, preventing degradation and ensuring the longevity and efficiency of the light source, while also improving the quality and accuracy of light transmission.
Implementation Method 1
if the light emitted from the light source is reflected at the surface of the filter, the light source can be irradiated with the reflected light returned
Data Source
AI summary
An illumination apparatus configured to provide illumination while changing a spectrum of light from a light source includes a wavelength variable unit configured to change a spectrum of irradiating light, and an optical system configured to irradiate the wavelength variable unit with the light from the light source. The wavelength variable unit is disposed so that an incident surface of the wavelength variable unit on which the light emitted from the optical system is incident is tilted with respect to a plane perpendicular to an optical axis of the optical system.