Time-Binned Matrix Trees for Navigable Manufacturing Heat Maps
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Solution Overview
Problem
The increasing complexity of semiconductor manufacturing processes, with tighter tolerances on output parameters, makes it difficult for process engineers to efficiently process and present massive amounts of trace and metrology information for effective analysis.
Innovation Solution
A computer-implemented method that organizes data into matrices based on time bins, creates a tree of matrices to summarize data, and generates heat maps for interactive presentation, using techniques like sparse column formats to optimize storage and computation, allowing real-time navigation and filtering of data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If massive amounts of trace and metrology information are collected to improve manufacturing precision, then measurement precision is improved, but it becomes exceedingly difficult for process engineers to inspect the information to find patterns
Solution Approach 1:
The patent segments the massive dataset into manageable time bins, where each bin contains a subset of data records. This segmentation allows process engineers to inspect information in smaller, organized units rather than being overwhelmed by the complete dataset, directly addressing the difficulty of information inspection while preserving measurement precision through systematic organization.
Solution Approach 2:
The patent introduces an intermediary data structure (the organized collection of time bins with associated data records) that mediates between the raw massive dataset and the process engineer's analysis needs. This intermediary structure enables efficient pattern recognition by providing a structured view of the data without losing the precision of the original measurements.
2Manufacturing precision
If tight tolerances are applied to output parameters to improve manufacturing precision, then manufacturing precision is improved, but scrap and rework rates increase
Solution Approach 1:
The patent enables preliminary action by allowing process engineers to perform root cause analysis on organized trace and metrology information before manufacturing defects become permanent issues. By systematically organizing data into time bins and enabling efficient pattern recognition, the system allows for early detection of process deviations, preventing defective products from being manufactured in the first place, thus reducing scrap rates while maintaining tight tolerances.
3Measurement precision
If more instrumentation is applied to collect trace and metrology information to improve manufacturing precision, then measurement precision is improved, but the complexity of processing and presenting the information increases
Solution Approach 1:
The patent applies segmentation by dividing the information processing task into manageable time bins, where each bin organizes a specific subset of data records. This segmentation reduces the apparent complexity of processing and presenting information from multiple instrumentation sources, as engineers can analyze organized time-bin data rather than navigating raw unstructured data from numerous sensors.
Solution Approach 2:
The patent changes the organizational parameter of the data from unstructured raw information to a structured format with time bins and associated data records. This parameter change in data organization transforms complex multi-source instrumentation data into a systematically arranged format that is easier to process and present, while preserving all the precise measurement information collected by the instrumentation.
Data Source
AI summary
In some embodiments, a system is provided that includes a data store, a server computing system, and a browser computing system. The data store is configured to store data records. The server computing system is configured to receive a query from the browser computing system for information from data records between a start time and an end time; retrieve the data records from the data store; generate a plurality of matrices representing the information from the data records, where each matrix of the plurality of matrices is associated with a time bin; and transmit the plurality of matrices to the browser computing system. The browser computing system is configured to generate a tree of matrices, wherein parent matrices of the tree combine values from the matrices of the plurality of matrices, and present a heat map using the tree.