Time-Divided Laser Output for Speckle and Energy Loss Control

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Solution Overview

Problem

Existing optical devices using laser beams face challenges in improving processing accuracy and energy efficiency, including energy loss, intensity control, speckle suppression, and timing control of laser beams.

Innovation Solution

The optical device incorporates multiple laser light sources, output modules with optical modulators, and a time divider that divides laser beams in time, along with optional subsidiary dividers, to enhance control over laser beam output and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If multiple laser light sources are used to improve energy efficiency and reduce energy loss, then the system complexity increases due to the need for beam synchronization and coordination

Engineering Contradiction:
Improveenergy lossVSAvoidsystem complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The invention divides the laser beam into multiple segments using a beam splitter, creating multiple separate laser beams from a single source. This segmentation allows the system to achieve multiple functions (reducing energy loss through coordinated output, suppressing speckles through phase differentiation) while maintaining a relatively simple single-source configuration rather than managing multiple independent laser sources.

Inventive Principle:
Principle #1Segmentation

2Manufacturing precision

If a time divider is used to divide laser beams in time to control output timing and intensity, then the manufacturing precision of the optical path increases

Engineering Contradiction:
Improveoptical path precisionVSAvoiddevice complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention employs periodic modulation of the laser beam output through coordinated control of multiple beams, creating time-divided output patterns. This periodic action enables precise control of beam timing and intensity without requiring complex mechanical time-division devices, achieving the desired manufacturing precision through temporal coordination of optically divided beams.

Inventive Principle:
Principle #19Periodic action

3Measurement precision

If optical modulators are added to control output intensity and timing, then the control precision improves but the device complexity increases

Engineering Contradiction:
Improvecontrol precisionVSAvoiddevice complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention makes the beam splitter and laser source perform multiple functions simultaneously: the beam splitter not only divides the beam spatially but also enables temporal coordination when combined with the modulation system, while the laser source provides both high-power output and serves as a reference for synchronization. This multi-functionality reduces the need for separate dedicated components for each control function, thereby limiting the increase in device complexity while maintaining high control precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces energy loss, improves energy efficiency, allows for precise control of output intensity and timing, and suppresses speckles, thereby enhancing the overall performance of the optical device.

Implementation Method 1

The time divider divides the laser beam using a plurality of reflecting surfaces

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

an acousto-optic device disposed between the light source and the output module

Methodology Applied
Scientific EffectAcousto-optic effect: Acousto-optic Effect

Data Source

PatentUS12248253B2Optical device, exposure device, method for manufacturing flat panel display, and method for manufacturing device
Publication Date: 2025.03.11 NIKON CORP
  • US12248253B2 patent drawing
  • US12248253B2 patent drawing
  • US12248253B2 patent drawing

AI summary

An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.