Timestamped Substrate Data Storage for Fast Retrieval
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Solution Overview
Problem
In conventional substrate processing systems, the time required for a terminal device to acquire information from an information managing apparatus is excessive due to the need to reconfigure and interpolate data from multiple tables, leading to inefficiencies in data searching and analysis.
Innovation Solution
The system implements an information managing method that stores apparatus information at the time of transmission in a first storage unit and accumulates it in a second unit upon satisfying specific conditions, associating it with a timestamp, allowing for efficient retrieval and display of relevant data through a terminal device.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If apparatus information is stored in multiple separate tables for different parameters, then data organization is comprehensive, but data retrieval time increases due to reconfiguration and interpolation requirements
Solution Approach 1:
The patent combines multiple separate parameter tables into a single integrated storage structure where all apparatus information (temperature, pressure, gas flow rates, etc.) is stored together with their corresponding timestamps. This merging eliminates the need to reconfigure and interpolate data across multiple tables, directly reducing retrieval time while maintaining comprehensive data organization.
Solution Approach 2:
The patent performs preliminary organization of data by storing all apparatus parameters with their timestamps in a unified structure at the time of data collection. This preliminary action prepares the data in advance for efficient retrieval, eliminating the need for subsequent reconfiguration and interpolation operations when data is requested.
2Loss of information
If all apparatus information is stored with every transmission, then data completeness is improved, but data storage volume increases
Solution Approach 1:
The patent applies partial action by selectively storing only the necessary apparatus parameters that are relevant to the specific analysis or monitoring needs. Rather than storing excessive data, the system identifies and stores only the critical parameters (such as temperature, pressure, and gas flow rates) with their timestamps, achieving data completeness for essential parameters while controlling storage volume.
3Stability of the object's composition
If data is interpolated retroactively to compensate for missing values, then data continuity is improved, but processing complexity increases
Solution Approach 1:
The patent performs preliminary organization of data by storing all apparatus parameters with their timestamps in a unified structure at the time of data collection. This preliminary action prepares the data in advance for efficient retrieval, eliminating the need for subsequent reconfiguration and interpolation operations when data is requested.
Data Source
AI summary
An information managing method for managing information based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, the information managing method comprising: storing the apparatus information of the substrate processing apparatus at a transmission time of the electronic message in a first apparatus information storage unit; comparing the event information with a condition for accumulating the apparatus information when the electronic message is transmitted; and accumulating the apparatus information in a second apparatus information storage unit by associating the apparatus information with a time stamp of a generation of the event information when the condition is satisfied.