Timing Adjustment Valve for Precise Suck-Back Sequencing
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Solution Overview
Problem
Existing systems face challenges in precisely controlling the timing of fluid flow and suck-back operations in semiconductor manufacturing, leading to inconsistencies in liquid supply due to simultaneous drive fluid discharge from opening/closing and suck-back mechanism units, complicating precise liquid control.
Innovation Solution
A timing adjustment valve with a check valve mechanism and a timing adjustment mechanism that allows fluid flow when the drive fluid pressure reaches a predetermined value, ensuring synchronized operation with the opening/closing valve unit to initiate suck-back only after fluid flow is closed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a common switching valve is used to control both the opening/closing valve unit and the suck-back mechanism unit, then the control structure is simplified, but the timing control precision deteriorates because both units discharge drive fluid simultaneously making it difficult to match closing timing with suck-back timing
Solution Approach 1:
The patent segments the control system by introducing a timing adjustment valve that separates the control of drive fluid discharge timing for the opening/closing valve unit and the suck-back mechanism unit. This timing adjustment valve includes a first flow passage for controlling discharge to the opening/closing valve unit and a second flow passage for controlling discharge to the suck-back mechanism unit, allowing independent timing adjustment of each unit's drive fluid discharge.
Solution Approach 2:
The timing adjustment valve acts as an intermediary device between the common switching valve and the two controlled units. It receives drive fluid from the common switching valve and selectively distributes it to the opening/closing valve unit and suck-back mechanism unit at different times, mediating the timing discrepancy between these two units.
2Ease of operation
If drive fluid is discharged from the suck-back mechanism unit simultaneously with the opening/closing valve unit, then the control operation is simplified, but the liquid supply consistency deteriorates because suck-back may start before fluid flow is fully closed
Solution Approach 1:
The timing adjustment valve enables preliminary action by first discharging drive fluid to the opening/closing valve unit to ensure complete fluid flow closure before discharging drive fluid to the suck-back mechanism unit. This sequential discharge ensures that the suck-back operation only begins after the fluid passage is fully closed, preventing premature suck-back that would compromise liquid supply consistency.
3Speed
If the suck-back mechanism unit starts operation before the opening/closing valve unit completes closure, then the response time is reduced, but the manufacturing precision deteriorates due to inconsistent liquid supply amounts
Solution Approach 1:
The timing adjustment valve introduces dynamic control by allowing independent adjustment of discharge timing and flow rates to different units. The valve can dynamically respond to the closure status of the opening/closing valve unit and adjust the timing of suck-back initiation accordingly, optimizing both response time and liquid supply precision for different operational requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control of fluid flow and suck-back operations, ensuring timely initiation of suck-back mechanisms after fluid closure, thereby maintaining consistent liquid supply in semiconductor manufacturing.
Implementation Method 1
a check valve mechanism which allows a fluid in the internal flow passage to flow from the first port to the second port and prevents the fluid in the internal flow passage from flowing from the second port to the first port
Implementation Method 2
the drive fluid is supplied to the cylinder chamber to cause a force due to the pressure of the drive fluid in the cylinder chamber to move the piston against a biasing force of the biasing spring
Implementation Method 3
There is arranged in the cylinder chamber a biasing spring which biases the piston in a direction to press the valve element against the valve seat
Implementation Method 4
by supplying the drive fluid to the cylinder chamber, the force due to the pressure of the drive fluid in the cylinder chamber moves the piston against the biasing force of the biasing spring to expand the diaphragm toward the suck-back chamber
Implementation Method 5
increase or decrease a volume of a suck-back chamber being in communication with the pipe by elastic deformation of a diaphragm interlocking with the piston
Data Source
AI summary
A timing adjustment valve includes a pilot body provided with a first port, a second port, and a drive port, a check valve mechanism which allows a fluid to flow from the first port to the second port and prevents the fluid from flowing from the second port to the first port, and a timing adjustment mechanism which opens and closes an internal flow passage by supplying and discharging a drive fluid to and from the drive port. The timing adjustment mechanism is configured to be arranged in parallel with the check valve mechanism in the internal flow passage and allow the fluid to flow when the pressure of the drive fluid supplied and discharged to and from the timing adjustment mechanism through the drive port is equal to or less than a predetermined value.