Tin Compound Apparatus Cleaning to Prevent Stanoxane Contamination

The patent applies preliminary action by performing cleaning with non-polar solvent, alcohol, and ultrapure water in sequence before the apparatus is used for storing or processing tin compounds. This preliminary cleaning removes potential contaminants and prevents stanoxane compound adhesion from occurring in the first place, thereby maintaining tin compound purity without requiring intervention after contamination occurs.

The patent segments the cleaning process into three distinct sequential steps: (A) cleaning with non-polar solvent to remove organic contaminants, (B) cleaning with alcohol to remove intermediate contaminants, and (C) cleaning with ultrapure water to remove inorganic contaminants and residual cleaning agents. This segmentation allows each step to target specific types of impurities, achieving high purity results while maintaining a relatively simple overall process.

The patent converts the harmful reaction between tin compound, oxygen, and water that produces adhering stanoxane compounds into a beneficial cleaning opportunity. By deliberately introducing controlled amounts of oxygen and water through the structured cleaning sequence (non-polar solvent → alcohol → ultrapure water), the apparatus surfaces are cleaned of previous stanoxane deposits, and the final ultrapure water rinse prevents new stanoxane formation by leaving no organic residues that could catalyze the reaction.