Pressurized Tin Collection Bucket With In-Line Draining
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Solution Overview
Problem
EUV photolithography processes are disrupted due to the need to pause the EUV production for drainage of metal droplets in the collection bucket, causing inefficiencies and increased manufacturing costs due to waste of EUV light and collector mirror contamination.
Innovation Solution
A metal droplet collection bucket with a gate valve and heating element that allows for continuous EUV photolithography by maintaining ambient pressure during drainage, preventing back-splash and contamination, and enabling efficient collection and recycling of metal droplets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If the collection bucket is drained by pausing EUV production, then metal droplets can be removed from the bucket, but EUV light is wasted and production efficiency decreases
Solution Approach 1:
A gate valve is positioned at the rear portion of the collection bucket to isolate the drainage function from the main EUV production chamber. This allows drainage operations to be prepared and executed without disrupting the ongoing EUV light generation process, as the valve can be closed during production and opened only when drainage is needed.
Solution Approach 2:
The collection bucket is divided into two functionally independent zones: the front portion that receives metal droplets during EUV production, and the rear portion that can be isolated and drained separately via the gate valve. This segmentation enables one zone to be serviced (drained) while the other continues operating (collecting droplets).
2Productivity
If the collection bucket is drained at ambient pressure, then drainage can occur without pausing production, but back-splash and contamination may occur
Solution Approach 1:
A heating element is introduced as an intermediary mechanism between the metal droplets and the drainage process. By applying heat to the rear portion of the collection bucket, the metal droplets are kept in a molten state during drainage, which reduces surface tension and prevents back-splash, allowing safe drainage at ambient pressure while maintaining continuous production.
Solution Approach 2:
The temperature parameter of the metal droplets is changed by applying heat from the heating element. This parameter change maintains the droplets in a liquid state during drainage operations, fundamentally altering their behavior to prevent back-splash and contamination while enabling continuous production.
3Ease of operation
If metal droplets are not recycled, then the system is simpler to operate, but material waste increases and costs rise
Solution Approach 1:
The gate valve enables selective drainage of accumulated metal droplets from the rear portion of the collection bucket. The drained droplets can be collected and recycled back into the EUV production process, transforming a waste stream into a recoverable resource while maintaining simple operation through automated valve control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables uninterrupted EUV photolithography processes by allowing drainage without pausing production, reducing waste and extending the life of EUV collector mirrors through effective containment and recycling of metal droplets.
Implementation Method 1
a heating element positioned to heat metal droplets in the rear portion of the collection bucket
Implementation Method 2
a pressurized gas flows through the collection bucket to pressurize the metal droplets and force them out through an outlet tube
Data Source
AI summary
A droplet collection bucket includes a droplet collection tube, a level sensor positioned on the droplet collection tube, a gate valve configured to close a rear portion of the droplet collection tube, a gas supply configured to supply a gas into the rear portion of the droplet collection tube, a heating element wrapping around the droplet collection tube, and a drain tube connecting an interior of the droplet collection tube with an outside of the droplet collection tube.