Tin Trap Device Multiple Tube Gas Flow Direction Change
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Solution Overview
Problem
In extreme ultraviolet light generation apparatuses, the existing tin trap devices face challenges in effectively capturing tin particles, leading to reduced exhaust capacity and reliability due to the adherence of tin in the exhaust pump, which affects the overall performance of the EUV light generation process.
Innovation Solution
A tin trap device with a multiple tube configuration and a gas travel direction changing member that alters the flow path of the fastest residual gas, allowing it to contact more surface area and adhere to the tube members before reaching the exhaust pump, thereby reducing the amount of tin that enters the pump and maintaining the apparatus's reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gas flows directly from the gas inlet port to the gas exhaust port through a simple path, then the exhaust capacity is improved, but tin particles are not effectively captured and adhere to the exhaust pump reducing reliability
Solution Approach 1:
The gas flow path is segmented into multiple sections by dividing the internal space into a first space and a second space. The multiple tubes are arranged in the first space with their openings facing different directions, creating segmented flow paths that force gas to change direction multiple times before reaching the exhaust port, thereby capturing tin particles effectively.
Solution Approach 2:
The multiple tubes extend in the depth direction (third dimension) of the housing, with their openings facing different directions (upward, downward, leftward, rightward). This three-dimensional arrangement creates a complex gas flow path that increases contact between tin-containing gas and tube surfaces, improving tin capture while maintaining a compact structure.
2Reliability
If the gas flow path is extended to increase tin capture surface area, then tin particle capture is improved, but the device volume increases
Solution Approach 1:
Multiple tubes are nested or arranged closely within the limited internal space of the housing. The tubes are positioned to face different directions and are arranged in the depth direction, maximizing the use of three-dimensional space. This nested arrangement provides extensive tin capture surface area within a compact device volume.
Solution Approach 2:
The multiple tubes extend in the depth direction (third dimension) of the housing, utilizing vertical space rather than only horizontal expansion. This three-dimensional arrangement increases the total surface area available for tin capture without proportionally increasing the device's footprint volume.
3Reliability
If multiple tubes with different facing directions are arranged in the internal space, then gas flow direction changes improve tin capture, but the device complexity increases
Solution Approach 1:
Multiple tubes with different orientations are merged into a single integrated multiple tube structure within the housing. Rather than using separate capture devices for different directions, all tubes are combined in one unit, simplifying the overall device structure while maintaining effective tin capture from gas flowing in multiple directions.
Solution Approach 2:
The multiple tubes serve multiple functions simultaneously: they act as both the structural framework and the tin capture surfaces. The tubes facing different directions collectively handle gas flow from various directions, making the device universally effective for capturing tin particles regardless of the specific flow direction.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses the passage of tin into the exhaust pump, preventing clogging and maintaining the apparatus's reliability by ensuring that tin adheres to the tube members before being processed, thus enhancing the EUV light generation process's efficiency and reducing downtime for maintenance.
Implementation Method 1
having a temperature at which the tin deposited from the gas adheres to the tube member
Data Source
AI summary
A tin trap device may include a housing including a gas inlet port into which gas containing tin flows from a chamber device, an internal space which communicates with the gas inlet port, and a gas exhaust port which exhausts the gas while communicating with the internal space; a multiple tube including a plurality of tube members, arranged on a flow path of the gas traveling to the gas exhaust port from the gas inlet port through the internal space, and having a temperature at which the tin deposited from the gas adheres to the tube member; and a gas travel direction changing member configured to change a travel direction of at least fastest gas of the gas traveling from the gas inlet port to the multiple tube.