Tip Apex Temperature Control via Optical Feedback

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Solution Overview

Problem

It is challenging to reliably predict and control the temperature of the tip apex in a charged particle source, such as a gas field ion source, using resistive heating systems, as minor variations in current, voltage, or power supply can lead to inconsistent tip temperatures, making it difficult to maintain the desired temperature range.

Innovation Solution

A system comprising a charged particle source, a detector, and a controller that uses the light emitted by the tip apex to monitor and adjust the heating, allowing for precise temperature control within a desired range by comparing detected light to expected light levels at the target temperature.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a resistive heating system is used to heat the tip apex, then the tip apex can be heated to the desired temperature, but it is difficult to reliably predict and control the temperature within the desired range

Engineering Contradiction:
Improvetip apex temperatureVSAvoidtemperature control reliability
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent employs a feedback control system where a detector (such as a photodiode or photomultiplier tube) measures the light intensity emitted by the tip apex, and this measurement is fed back to a controller that adjusts the heating power accordingly. This closed-loop feedback mechanism enables reliable temperature control by continuously monitoring and adjusting the heating based on the actual thermal state of the tip apex, resolving the unpredictability issue of open-loop resistive heating.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces direct mechanical/physical temperature measurement and control with an optical measurement system. Instead of using thermocouples or other direct contact temperature sensors that may interfere with the tip apex, the system uses light emission detection (blackbody radiation measurement) to infer temperature, substituting a non-contact optical field measurement for traditional thermal measurement methods.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If light detection is used to control tip apex temperature, then temperature control precision is improved, but system complexity increases

Engineering Contradiction:
Improvetemperature measurement precisionVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent leverages the dual functionality of the tip apex: it serves both as the charged particle source and as the light-emitting temperature indicator. The same tip apex structure that generates ions or electrons also emits blackbody radiation for temperature measurement, eliminating the need for separate temperature sensing components and reducing overall system complexity while maintaining high measurement precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables reliable and reproducible temperature control of the tip apex, ensuring it remains within a specific range (e.g., +/- 100K) during initial formation and re-formation, facilitating automation and reducing costs.

Implementation Method 1

the tip apex is capable of generating light when heated

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Implementation Method 2

where a resistive heating system (e.g., resistive heater wire) is used to heat the tip apex

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentEP2441083B1Method and system for heating a tip apex of a charged particle source
Publication Date: 2021.03.31 CARL ZEISS MICROSCOPY LLC
  • EP2441083B1 patent drawingFigure 1~2
  • EP2441083B1 patent drawingFigure 3A~3B
  • EP2441083B1 patent drawingFigure 4

AI summary

System and method for heating an apex of a tip of a charged particle source, for example, a gas ion source, comprising a detector configured to detect light generated by the tip apex, and a controller coupled with the charged particle source and the detector so that the controller can control heating of the tip apex based on the light detected by the detector.