Total Internal Reflection Prism Unit for Homogeneous Line Beam
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Solution Overview
Problem
The formation of a homogeneous line beam in semiconductor manufacturing is hindered by deviations in the shape of aspherical or Powell lenses due to process or assembly failures, leading to inconsistent light distribution.
Innovation Solution
A total internal reflection prism unit comprising multiple prisms with specifically oriented and aligned surfaces to redirect light into discrete beams, which are then condensed using a lens unit to form a homogeneous line beam, ensuring consistency regardless of prism shape deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If aspherical lens or Powell lens is used to form line beam, then line beam can be formed, but homogeneity is poor when shape deviation or assembly failure occurs
Solution Approach 1:
The patent divides the optical system into multiple discrete prisms (first prism with first and second total reflection surfaces, second prism with third and fourth total reflection surfaces) instead of using a single aspherical lens or Powell lens. Each prism independently redirects light to form separate beams (first beam and second beam) that are then combined to form the line beam. This segmentation allows each prism to be manufactured with standard precision while achieving the desired homogeneous line beam output through their collective arrangement.
Solution Approach 2:
The patent introduces multiple total reflection surfaces as intermediary elements between the light source and the final line beam. These surfaces (first total reflection surface, second total reflection surface, third total reflection surface, fourth total reflection surface) act as mediators that redirect light in specific directions (first horizontal direction, second horizontal direction, third horizontal direction) to create discrete beams that are then combined. This intermediary approach replaces the direct shape-dependent focusing of aspherical lenses with a modular reflection-based system.
2Reliability
If aspherical lens or Powell lens is used, then line beam formation is achieved, but assembly failure leads to non-homogeneous beam
Solution Approach 1:
The patent segments the optical system into multiple independent prisms with clearly defined functions. Each prism contains specific total reflection surfaces oriented at defined angles to redirect light in specific directions. This segmentation creates discrete, manageable components (first prism, second prism, each with their respective reflection surfaces) that can be assembled in a standardized configuration, reducing assembly complexity compared to precisely aligning a single aspherical lens.
Solution Approach 2:
The patent changes the fundamental optical parameter from refractive focusing (aspherical lens) to reflective redirection (total internal reflection surfaces). By using total internal reflection at specifically oriented surfaces instead of shape-dependent refraction, the system achieves beam formation through geometric arrangement rather than precise curved surface manufacturing, thereby improving reliability against assembly variations.
3Reliability
If total internal reflection prism unit is used to redistribute light, then homogeneous line beam is formed, but device structure becomes more complex
Solution Approach 1:
The patent merges the functions of multiple total reflection surfaces into a coordinated prism assembly. The first prism combines first and second total reflection surfaces to form the first beam, while the second prism combines third and fourth total reflection surfaces to form the second beam. These prisms are then positioned adjacent to each other with their exit surfaces aligned, merging their individual beam outputs into a single homogeneous line beam. This merging approach consolidates the complexity into a compact, integrated unit.
Solution Approach 2:
The patent applies local quality by assigning specific functions to specific surfaces within the prism assembly. Each total reflection surface (first, second, third, fourth) is oriented at a specific angle and position to perform a dedicated light redirection function. The first and second surfaces handle light for the first beam, while the third and fourth surfaces handle light for the second beam. This localized functional assignment allows each surface to be optimized for its specific role while contributing to the overall homogeneous line beam output.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively redistributes light into discrete beams that are accurately aligned and condensed, ensuring the formation of a homogeneous line beam, even with shape deviations in the prisms, thus enhancing the reliability of semiconductor manufacturing processes.
Implementation Method 1
The first total reflection surface may totally reflect a light incident in a first horizontal direction along a second horizontal direction substantially perpendicular to the first horizontal direction
Data Source
AI summary
A total internal reflection prism unit may include a first prism and a second prism. The first prism may include a first total reflection surface, which totally reflect slight incident in a first horizontal direction along a second horizontal direction substantially perpendicular to the first horizontal direction, and a second total reflection surface, which totally reflects the totally reflected light from the first total reflection surface along the first horizontal direction to form a first beam. The second prism may include a third total reflection surface, which totally reflects the light along a third horizontal direction substantially perpendicular to the first horizontal direction, and a fourth total reflection surface, which totally reflects the totally reflected light from the third total reflection surface along the first horizontal direction to form a second beam. The second beam may be discrete from the first beam along the third horizontal direction.