Titanium Aluminum Sputtering Targets for Coating Uniformity
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Solution Overview
Problem
Existing technologies face challenges in producing high-quality, uniform metallic or metal oxide coatings on larger substrates due to equipment costs and the need for consistent coating uniformity, with current primer layers in low emissivity coatings being susceptible to corrosion and oxidation, leading to degradation during high-temperature processing.
Innovation Solution
Development of titanium and aluminum-containing coatings with varying weight ratios, applied using sputtering targets that include titanium and aluminum mixtures or alloys, which are sputtered in inert or reactive gases to produce durable, chemically resistant films with controlled optical properties, allowing for uniform or gradient composition coatings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional primer layers are used in low emissivity coatings, then the coating structure is simple and easy to manufacture, but the primer layers are susceptible to corrosion and oxidation leading to degradation during high-temperature processing
Solution Approach 1:
The patent applies composite materials by creating a multi-layer primer structure consisting of a first primer layer (e.g., zinc oxide) and a second primer layer (e.g., titanium oxide or aluminum oxide). This composite structure combines the advantages of different materials: the first primer layer provides initial protection while the second primer layer offers enhanced corrosion and oxidation resistance, particularly during high-temperature processing. The layered composite approach resolves the contradiction by achieving superior reliability without requiring a complete redesign of the coating structure.
Solution Approach 2:
The patent implements local quality by assigning different functional properties to different layers of the primer structure. The first primer layer is optimized for base adhesion and initial corrosion resistance, while the second primer layer is specifically designed to provide oxidation resistance at high temperatures. This localized functional differentiation allows each layer to perform its specific function optimally, resolving the contradiction between reliability and structural simplicity.
2Manufacturing precision
If sputtering is used to deposit coatings on larger area substrates, then coating uniformity can be achieved, but equipment costs and operational expenses increase
Solution Approach 1:
The patent applies segmentation by dividing the primer structure into multiple functional layers, each deposited through sputtering processes. While this requires sophisticated equipment, the segmented layered structure allows for optimized deposition parameters for each layer, improving overall coating uniformity. The segmentation principle is applied to the coating structure itself rather than the manufacturing process, achieving precision through structural division.
Solution Approach 2:
The patent utilizes parameter changes by optimizing sputtering conditions such as gas composition (reactive vs. inert), power density, deposition rate, and layer thickness for each primer layer. By carefully controlling these parameters, the process achieves uniform coating deposition even on large area substrates. The parameter optimization reduces the need for expensive equipment upgrades by maximizing the efficiency of existing sputtering systems.
3Ease of manufacture
If zinc oxide is used as a dielectric layer in low emissivity coatings, then the coating can be manufactured with conventional materials, but the zinc oxide layer is susceptible to attack by acids and bases
Solution Approach 1:
The patent applies composite materials by combining zinc oxide (first dielectric layer) with more chemically resistant materials such as titanium oxide or aluminum oxide (second dielectric layer). The zinc oxide layer maintains its advantages of ease of manufacture and conventional processing, while the additional second dielectric layer provides enhanced chemical resistance against acids and bases. This composite approach resolves the contradiction by layering materials with complementary properties.
Solution Approach 2:
The patent implements preliminary action by depositing the first dielectric layer (zinc oxide) and first primer layer before thermal processing, establishing a base structure with good manufacturability. The second dielectric layer is then added to provide preliminary chemical protection before the coating undergoes exposure to harsh environments. This sequential approach ensures both ease of manufacture and chemical resistance are achieved.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The titanium and aluminum coatings provide enhanced chemical and mechanical durability, improved thermal processing control, and increased stability of low emissivity coatings, reducing degradation and maintaining performance over time.
Implementation Method 1
sputtering, such as magnetic sputtering vapor deposition ('MSVD')
Data Source
AI summary
Titanium and aluminum cathode targets are disclosed for sputtering absorbing coatings of titanium and aluminum-containing materials in atmospheres comprising inert gas, reactive gases such as nitrogen, oxygen, and mixtures thereof, which can further comprise inert gas, such as argon, to form nitrides, oxides, and oxynitrides, as well as metallic films. The titanium and aluminum-containing coatings can be utilized as an outer coat or as one or more coating layers of a coating stack.