Titanium Getter Structure for Gyroscope Vacuum Stability
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Solution Overview
Problem
Semiconductor devices, particularly those with motion sensors like gyroscopes, face challenges in maintaining a stable vacuum environment due to outgassing, which affects the performance and stability of these sensors.
Innovation Solution
Incorporating a getter structure comprising titanium within the semiconductor device to react with and remove gases in the vacuum-sealed space, thereby reducing outgassing and maintaining a stable vacuum, improving the performance and stability of the gyroscope.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a vacuum-sealed space is created for the gyroscope, then the gyroscope performance is improved, but outgassing occurs which degrades the vacuum stability
Solution Approach 1:
A getter structure is introduced as an intermediary substance within the vacuum-sealed space. This getter structure actively absorbs and removes outgassed molecules, mediating between the vacuum environment and the outgassing sources, thereby maintaining vacuum stability without compromising gyroscope performance
Solution Approach 2:
The getter structure operates autonomously to maintain vacuum conditions. It continuously absorbs outgassing products without requiring external intervention or control systems, enabling the vacuum-sealed space to self-regulate its internal atmosphere and maintain stability over time
2Stability of the object's composition
If the vacuum-sealed space is sealed tightly, then vacuum stability is improved, but outgassing accumulates which harms the vacuum environment
Solution Approach 1:
The getter structure transforms the harmful outgassing byproducts into beneficial effects. By chemically absorbing the outgassed molecules, the getter converts what would be vacuum-degrading contaminants into stable compounds, effectively turning the harmful outgassing process into a beneficial vacuum-maintenance mechanism
Solution Approach 2:
The getter structure changes the chemical composition parameters within the vacuum-sealed space. It selectively absorbs specific gas molecules, altering the partial pressures and composition ratios of different gases, thereby transforming the harmful outgassing mixture into a cleaner vacuum environment with controlled parameters
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The use of a titanium-based getter structure significantly reduces outgassing, enhancing the stability and performance of the vacuum environment in semiconductor devices with motion sensors like gyroscopes.
Implementation Method 1
Incorporating a getter structure comprising titanium within the semiconductor device to react with and remove gases in the vacuum-sealed space
Implementation Method 2
the getter structure comprises titanium... to react with and remove gases
Data Source
AI summary
A semiconductor device is provided. The semiconductor device includes a metal layer. The semiconductor includes a gyroscope including a getter structure overlying the metal layer, wherein the getter structure comprises titanium.