Micromachined Titanium Microfluidic Structures for High Pressure

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Solution Overview

Problem

Microfluidic applications, such as high-performance liquid chromatography (HPLC), face limitations in pressure handling due to the mechanical properties of typical polymer materials used in microfluidic chips, while materials like type 304 stainless steel lack effective micromachining techniques.

Innovation Solution

The use of commercially pure titanium for microfluidic structures, specifically HPLC columns, which offers superior mechanical properties and allows for advanced micromachining techniques, including diffusion bonding and electrical discharge machining, enabling higher pressure applications.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If polymer materials are used for microfluidic structures, then ease of manufacture is improved, but pressure handling capability deteriorates

Engineering Contradiction:
Improveease of manufactureVSAvoidpressure handling capability
Core Design Contradiction:
Ease of manufactureVSStrength

Solution Approach 1:

The patent employs titanium, a metallic material with superior mechanical properties, to replace traditional polymer materials in microfluidic structures. This material substitution resolves the contradiction by providing both high pressure handling capability and compatibility with advanced micromachining techniques, achieving a balance between structural strength and manufacturability.

Inventive Principle:
Principle #40Composite materials

2Strength

If type 304 stainless steel is used for microfluidic structures, then pressure handling capability is improved, but micromachining capability deteriorates

Engineering Contradiction:
Improvepressure handling capabilityVSAvoidmicromachining capability
Core Design Contradiction:
StrengthVSEase of manufacture

Solution Approach 1:

The patent selects titanium as the material, which has different physical and mechanical parameters compared to type 304 stainless steel. Titanium offers comparable or superior pressure handling capability while simultaneously providing excellent micromachinability, thus resolving the contradiction through material parameter optimization.

Inventive Principle:
Principle #35Parameter changes

3Strength

If titanium is used for microfluidic structures, then pressure handling capability and micromachining capability are improved, but manufacturing complexity increases

Engineering Contradiction:
Improvepressure handling capabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent employs electrical discharge machining (EDM), a non-traditional machining method that uses electrical energy instead of mechanical cutting forces, to manufacture microfluidic structures in titanium. This substitution enables precise micromachining of titanium without the limitations of conventional mechanical machining, resolving the contradiction between material strength and manufacturing complexity.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Titanium-based microfluidic structures can handle higher pressures and maintain fine features, enhancing the performance of HPLC columns and other microfluidic devices by providing better mechanical properties and bio-compatibility.

Implementation Method 1

Holes 105, 107, 125 and 127 are typically created using electrical discharge machining (EDM) in accordance with the invention. EDM is a technique typically used for hard metals that are electrically conductive. EDM is a nontraditional method of removing material using a series of rapidly recurring electric arcing discharges between an electrode and a work piece such as titanium sheets 110 and 120

Methodology Applied
Scientific EffectElectrical discharge machining: Electrical Discharge Machining

Implementation Method 2

Like type 304 stainless steel, titanium allows diffusion bonding to create multilayer structures from sheets as thin as 1-2 mils. Titanium diffusion bonding is typically carried out at temperatures greater than about 750° C. but needs to be below the hexagonal closed packed (HCP) to body centered cubic (BCC) transition

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Data Source

PatentUS8501029B2Micromachined titanium for high pressure microfluidic applications
Publication Date: 2013.08.06 AGILENT TECHNOLOGIES INC
  • US8501029B2 patent drawing
  • US8501029B2 patent drawing
  • US8501029B2 patent drawing

AI summary

In accordance with the invention, a method for making microfluidic structures in bulk titanium is disclosed. Specific microfluidic structures include HPLC structures.