Transient Liquid Phase Bonding Alloy Control

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Solution Overview

Problem

Existing bonding techniques for power electronics, such as transient liquid phase (TLP) bonding, face challenges in achieving a homogeneous bondline without thickness limitations and excessive bonding time, leading to non-uniformity and unpredictability, especially in high-temperature applications like Cu—Sn bonding.

Innovation Solution

The method employs transient liquid phase bonding with altered surface properties to increase contact area and control the formation of a single alloy, like Cu3Sn, which offers better electrical conductivity and reduced stress, by applying mechanical pressure and optimizing the bonding process to achieve a homogeneous bondline within a shorter time frame.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional TLP bonding is used to join materials, then bonding strength is achieved, but the bondline becomes non-homogeneous with multiple alloys leading to unpredictable properties

Engineering Contradiction:
Improvebonding reliabilityVSAvoidbondline uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating a gradient in interlayer thickness, where the interlayer is thinner at the edges and thicker at the center. This non-uniform thickness distribution controls the diffusion process locally, ensuring that alloy formation occurs uniformly throughout the bondline while maintaining the desired single-phase microstructure. The varying thickness compensates for edge effects and promotes homogeneous bonding across the entire interface.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent utilizes parameter changes by controlling the interlayer thickness as a critical parameter. By optimizing the thickness profile (thinner at edges, thicker at center) and maintaining it within a specific range (1-10 micrometers), the process achieves uniform alloy formation. The thickness parameter is carefully controlled to ensure complete consumption of the interlayer material, transforming the bondline from multi-alloy to single-alloy composition.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If bonding time is extended to achieve homogeneous bondline, then alloy uniformity improves, but production efficiency decreases

Engineering Contradiction:
Improvebondline homogeneityVSAvoidproduction speed
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent applies preliminary action by pre-configuring the interlayer thickness profile before bonding begins. The interlayer is deposited with a specific thickness gradient (thinner at edges, thicker at center) that anticipates the diffusion behavior during bonding. This preliminary preparation ensures that the alloy formation process proceeds uniformly and completes in a predictable, shortened time frame, eliminating the need for extended bonding durations.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent employs dynamics by optimizing the bonding process parameters (temperature, time, pressure) to work synergistically with the interlayer thickness profile. The dynamic control of these parameters ensures that the diffusion process progresses at an optimal rate, achieving homogeneous single-alloy bondline formation rapidly. The process is tuned to complete transformation within a specific time window, balancing uniformity and speed.

Inventive Principle:
Principle #15Dynamics

3Adaptability or versatility

If interlayer thickness is increased to accommodate fabrication variations, then process robustness improves, but bonding time increases excessively

Engineering Contradiction:
Improvefabrication toleranceVSAvoidbonding duration
Core Design Contradiction:
Adaptability or versatilityVSDuration of action of moving object

Solution Approach 1:

The patent applies local quality by implementing a thickness gradient in the interlayer, with varying thickness at different locations (thinner at edges, thicker at center). This local variation provides tolerance for fabrication variations while maintaining overall process robustness. The gradient profile ensures that even with manufacturing tolerances, the minimum thickness anywhere in the bondline remains within the optimal range for rapid, uniform alloy formation.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent utilizes parameter changes by optimizing the interlayer thickness to fall within a specific range (1-10 micrometers). This parameter control ensures that the interlayer is thin enough to consume quickly and form uniform alloy rapidly, yet thick enough to accommodate reasonable fabrication variations. The thickness parameter is carefully selected to balance robustness and speed.

Inventive Principle:
Principle #35Parameter changes

4Reliability

If multiple alloys form in the bondline, then material compatibility is achieved, but electrical conductivity and stress characteristics deteriorate

Engineering Contradiction:
Improvematerial compatibilityVSAvoidelectrical conductivity uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The patent applies parameter changes by controlling the interlayer thickness and bonding parameters to achieve complete consumption of the interlayer material. This transformation changes the bondline composition from multiple alloys to a single desired alloy phase. The parameter optimization ensures uniform diffusion and complete reaction, producing a homogeneous single-alloy bondline with improved and predictable electrical conductivity and stress characteristics.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a reliable, high-conductivity bondline with reduced dependency on fabrication conditions, suitable for power electronics, enabling faster production and improved performance across various applications, including wafer-to-wafer and die-to-substrate bonding.

Implementation Method 1

transient liquid phase bonding

Methodology Applied
Scientific EffectTransient liquid phase bonding: Melting

Implementation Method 2

diffusion bonding in which diffusion occurs when a melting point depressant element from an interlayer moves into lattice and grain boundaries of the substrates

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 3

applying mechanical pressure

Methodology Applied
Scientific EffectMechanical pressure: Compression

Data Source

PatentUS10058951B2Alloy formation control of transient liquid phase bonding
Publication Date: 2018.08.28 DENSO CORP
  • US10058951B2 patent drawing
  • US10058951B2 patent drawing
  • US10058951B2 patent drawing

AI summary

A bonding structure enabling fast and reliable methods to fabricate a substantially homogeneous bondline with reduced dependency of a thickness limitation is disclosed. Also, this system creates a bondline targeted for performance in power electronics. This system is highly adaptable as various structures and fabrication options may be implemented. This enables diverse fabrication selection and creates less dependency on outside conditions. The disclosed system is at least applicable to wafer-to-wafer, die-to-wafer, die-to-substrate, or die-to-die bonding.