TMD Monolayer Plasmonic Circuit Fabrication

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Solution Overview

Problem

The realization of electronic plasmonic-integrated circuits (EPICs) on a chip-scale has been challenging due to material limitations and device design issues, particularly in achieving bidirectional conversion between electrical and optical signals at nanometer scales, which is essential for next-generation high-speed communication and integration of electronics and photonics.

Innovation Solution

The use of transition metal dichalcogenides (TMDs) as a platform for fabricating EPICs, where monolayer TMDs like MoS2 and WS2 are integrated with plasmonic waveguides such as Ag nanowires to enable bidirectional conversion of electrical signals to surface plasmon polaritons (SPPs) and vice versa, allowing for efficient nanoscale optical communication and chip-level integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional materials and devices are used for integration, then manufacturing processes are well-established, but nanoscale optical communication and bidirectional signal conversion cannot be achieved

Engineering Contradiction:
Improvebidirectional signal conversion capabilityVSAvoidfabrication feasibility
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent employs composite material structures combining TMD monolayers with plasmonic waveguides (metal nanowires or slot waveguides). This composite approach enables bidirectional signal conversion by integrating the optical properties of TMDs with the plasmonic confinement capabilities of metal structures, achieving both nanoscale optical communication and electrical signal conversion that neither material could provide alone.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The TMD monolayer acts as an intermediary material between electrical signals and optical signals. It mediates the conversion process by enabling efficient coupling between electrical current and surface plasmon polaritons through its unique two-dimensional structure and optical properties, facilitating bidirectional signal transformation at the nanoscale interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Speed

If optical communication is implemented at nanometer scales, then data capacity and speed are improved, but material limitations prevent successful fabrication

Engineering Contradiction:
Improveoptical communication speedVSAvoidfabrication capability
Core Design Contradiction:
SpeedVSEase of manufacture

Solution Approach 1:

The patent changes the dimensional parameter of the active material from bulk or thin-film to monolayer thickness. This parameter change in the TMD structure enables strong light-matter interaction at the monolayer level, achieving efficient optical confinement and generation at nanometer scales while maintaining compatibility with existing fabrication techniques for depositing two-dimensional materials.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention transitions from three-dimensional bulk materials to two-dimensional monolayer structures. This dimensional reduction enables enhanced optical confinement and stronger interaction between light and matter at the nanoscale, allowing optical communication functionality to be achieved at thicknesses compatible with chip-scale integration while maintaining manufacturability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If TMD monolayers are used for signal conversion, then bidirectional electrical-optical conversion is enabled, but device integration complexity increases

Engineering Contradiction:
Improvesignal conversion functionalityVSAvoidintegration structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The TMD monolayer serves multiple functions simultaneously: it acts as the active medium for optical generation, the interface for plasmonic coupling, and the material for both electrical and optical signal transmission. This multi-functionality reduces the need for separate components for each function, thereby managing integration complexity while achieving versatile bidirectional signal conversion capability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent merges the functions of optical generation, optical confinement, and electrical signal conversion into a single integrated structure where the TMD monolayer is directly coupled with plasmonic waveguides. This merging of functions into a unified device architecture reduces the number of discrete components and interfaces, managing overall device complexity while achieving comprehensive signal conversion functionality.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables efficient conversion and propagation of SPPs, demonstrating potential for nanoscale optical communication and paving the way for fully integrated electronic-photonic circuits with increased computational speed and reduced power consumption, suitable for applications beyond silicon technology and Moore's law.

Implementation Method 1

When light is confined and propagating on the surface of a metal, it is called a surface plasmon polariton, and it is a result of interaction between electrical-magnetic field of light and collective oscillations of surface charge (surface plasmon).

Methodology Applied
Scientific EffectSurface plasmon polariton:

Implementation Method 2

another TMD device detects the SPP on the other end of waveguide

Methodology Applied
Scientific EffectSurface plasmon polariton detection:

Data Source

PatentUS10288804B2Method to fabricate chip-scale electronic photonic (plasmonic)-integrated circuits
Publication Date: 2019.05.14 UNIV HOUSTON SYST
  • US10288804B2 patent drawing
  • US10288804B2 patent drawing
  • US10288804B2 patent drawing

AI summary

Electronic-photonic integrated circuits (EPICs), such a monolithically integrated circuit, are considered to be next generation technology that takes advantage of high-speed optical communication and nanoscale electronics. Atomically thin transition metal dichalcogenides (TMDs) may serve as a perfect platform to realize EPIC. The generation and detection of light by a monolayer TMD at nanoscale through surface plasmon polaritons (SPPs) may be utilized to provide optical communication. The bidirectional nature of the TMDs allow such a layer to be utilizes as part of emitters or photodetectors for EPICs.