TMR Magnetic Sensor SNR via Interleaved Z-Axis Layout

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Solution Overview

Problem

Magnetic field sensors with high signal-to-noise ratio (SNR) require high power for operation, making them unsuitable for low power and high resolution magnetic sensing applications.

Innovation Solution

The implementation of a Wheatstone bridge circuit with identical sense elements, interleaved Z-axis layout, dual flux guides, and optimized reset line routing to reduce parasitic effects and enhance sense element packing density, thereby increasing the SNR of TMR magnetic field sensors without compromising sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If high power is supplied to the magnetic field sensor, then the signal-to-noise ratio (SNR) is improved, but the power consumption increases making it unsuitable for low power applications

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The sensor is divided into multiple sense elements arranged in a Wheatstone bridge circuit with four legs. Each leg contains an identical number of sense elements, allowing the total sensing function to be segmented across multiple components that work differentially to improve SNR while maintaining lower power requirements through balanced operation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A Z-axis layout is introduced by placing flux guides vertically between the pinned and free layers. This adds a dimensional element that concentrates magnetic flux through the sense elements, enhancing the magnetic field sensing capability and SNR without requiring increased power consumption

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Measurement precision

If more sense elements are packed into the sensor, then the SNR increases, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidsense element packing density
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Multiple sense elements are merged into integrated structures where adjacent elements share common connections and are fabricated using the same material layers and processes. The Wheatstone bridge configuration merges four legs of sense elements into a unified circuit that achieves high SNR through differential measurement while simplifying the overall device structure

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The sense elements are designed with specific geometric parameters including aspect ratios between 1:2 and 1:5, and controlled spacing between adjacent elements. These parameter optimizations enable dense packing of sense elements while maintaining manufacturability through standard fabrication processes and achieving high SNR through increased element density

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If sense elements are densely packed, then the SNR increases, but parasitic effects increase reducing measurement accuracy

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoidparasitic effects
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The Wheatstone bridge circuit is designed with asymmetric current paths where adjacent sense elements carry currents in opposite directions. This asymmetry causes parasitic effects such as resistive drops and thermal noise to oppose each other, resulting in cancellation of harmful parasitic signals while the differential magnetic sensing signals add constructively

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The parasitic effects that normally degrade sensor performance are converted into beneficial differential signals. By arranging sense elements to carry opposite currents, the parasitic voltage drops and thermal effects generate differential outputs that are indistinguishable from genuine magnetic field signals, allowing the measurement system to treat all differential signals as valid measurement data

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively increases the SNR of TMR magnetic field sensors for low power and high resolution sensing, allowing for denser packing of sense elements and reduced noise, while maintaining sensitivity and power efficiency.

Implementation Method 1

Tunneling Magnetoresistance (TMR) is a promising magnetic sensing technology for handset applications due to its advantages in sensitivity, power, and process cost compared with other magnetic sensors

Methodology Applied
Scientific EffectTunneling Magnetoresistance (TMR): Magnetoresistance

Implementation Method 2

dual flux guides are utilized for an optimal trench width while maintaining pitch and spacing constraints of a reference layer within a TMR sense element

Methodology Applied
Scientific EffectMagnetic flux concentration: Magnetic Field

Data Source

PatentUS12181539B2Magnetic field sensor with increased SNR
Publication Date: 2024.12.31 EVERSPIN TECHNOLOGIES INC
  • US12181539B2 patent drawing
  • US12181539B2 patent drawing
  • US12181539B2 patent drawing

AI summary

Various means for improvement in signal-to-noise ratio (SNR) for a magnetic field sensor are disclosed for low power and high resolution magnetic sensing. The improvements may be done by reducing parasitic effects, increasing sense element packing density, interleaving a Z-axis layout to reduce a subtractive effect, and optimizing an alignment between a Z-axis sense element and a flux guide, etc.