TMR Slider Oxidation Layer Prevents MRR Drop
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Solution Overview
Problem
Conventional TMR elements in disk drive sliders suffer from MRR drop due to metal material diffusion into the silicon layer, leading to reduced dynamic and read performance, as the metal layers are in direct contact with the silicon layer, forming a shunting path.
Innovation Solution
A method involving the formation of an oxidation layer on the TMR element's surface using a processing gas containing oxygen, which acts as a barrier to prevent metal diffusion, and a micro-texture forming process to enhance touch-down and take-off performance, comprising steps like positioning slider structural bodies on a tray, evacuating the chamber, introducing oxygen gas, and exposing them to an etching means to form an oxidation layer and a two-step structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If metal layers are in direct contact with silicon layer to simplify structure, then device complexity is reduced, but MRR drops due to metal diffusion forming shunting path
Solution Approach 1:
An oxidation layer is introduced as an intermediary barrier between the metal layers and silicon layer. This thin oxide layer prevents metal diffusion into the silicon while maintaining electrical isolation, thereby preserving MRR stability without significantly increasing structural complexity.
Solution Approach 2:
The structure employs a composite material approach by combining metal layers, oxidation layer, and silicon layer into a multi-layer stack. This composite structure leverages the properties of each material: metal for conductivity, oxidation layer for diffusion barrier, and silicon for substrate functionality, resolving the contradiction between simplicity and reliability.
2Manufacturing precision
If smooth slider surface is maintained for simple manufacturing, then manufacturing precision is improved, but touch-down and take-off performance deteriorates
Solution Approach 1:
The slider surface is modified with local micro-texture features rather than being uniformly smooth. These localized textured regions are created through controlled oxidation and etching processes, providing enhanced touch-down and take-off performance at specific locations while maintaining overall manufacturing feasibility.
Solution Approach 2:
The micro-texture is formed as a preliminary surface treatment before final slider assembly. By pre-forming the oxidation layer and micro-texture patterns on the slider surface early in the manufacturing process, the subsequent steps can focus on precise assembly without compromising the enhanced surface properties.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The oxidation layer effectively prevents MRR drop, maintaining consistent MRR values and improving dynamic and read performance of the slider, while the micro-texture enhances touch-down and take-off stability, reducing the difference between these parameters.
Implementation Method 1
the oxidation layer effectively prevents metal diffusion, maintaining consistent MRR values
Implementation Method 2
introducing a processing gas containing oxygen gas into the processing chamber; and exposing the slider structural bodies to an etching means in the atmosphere of the processing gas to oxidize a surface of the TMR element to form an oxidation layer thereon
Implementation Method 3
exposing the slider structural bodies to an etching means in the atmosphere of the processing gas
Data Source
AI summary
A method for preventing TMR (tunnel magneto-resistance) MRR (magneto-resistance resistance) drop of a slider, comprises steps of: positioning a row bar constructed by a plurality of slider structural bodies on a tray, each slider body having a pole tip with a TMR element; loading the tray into a processing chamber and evacuating the processing chamber to a preset pressure; introducing a processing gas containing oxygen gas into the processing chamber; and exposing the slider structural bodies to an etching means in the atmosphere of the processing gas to oxidize a surface of the TMR element to form an oxidation layer thereon. The invention also discloses a method for forming micro-texture on a surface of slider in same process, and a method for forming such a slider.