Superconducting Qubit Devices Using Transition Metal Silicide Heterojunctions

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional transmon implementations for quantum computing have limited prospects for scaling, and achieving high-quality superconductor-silicon interfaces with higher superconducting transition temperatures and tunable attributes remains a challenge.

Innovation Solution

The development of superconducting transition metal silicide (TMSi) structures, formed as thin films on oxide layers in silicon-on-insulator wafers, integrated into qubit devices with TMSi heterojunctions that provide a lattice-matched, atomically smooth interface with silicon, enabling the use of gate voltage to tune Cooper pair transport across a silicon weak link.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional transmon implementations using aluminum are used, then qubit devices can be fabricated with existing technology, but scaling prospects are limited and superconducting transition temperature is low (about 1.2 K)

Engineering Contradiction:
Improvesuperconducting transition temperatureVSAvoidscaling capability
Core Design Contradiction:
TemperatureVSProductivity

Solution Approach 1:

The patent changes the material parameter from aluminum to transition metal silicides (such as tungsten silicide, molybdenum silicide, niobium silicide), which fundamentally alters the superconducting transition temperature from approximately 1.2 K to higher values, enabling operation at elevated temperatures while maintaining superconducting properties

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention employs composite material structures consisting of transition metal silicide layers combined with silicon-based components and oxide barriers, creating a hybrid system that leverages the high-temperature superconductivity of TMSi while maintaining compatibility with silicon fabrication processes, thus enabling both improved temperature performance and scalability

Inventive Principle:
Principle #40Composite materials

2Reliability

If aluminum-based transmon devices are used, then fabrication is straightforward with existing processes, but high-quality superconductor-silicon interfaces with tunable attributes are difficult to achieve

Engineering Contradiction:
Improveinterface qualityVSAvoidtunability of superconducting attributes
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent utilizes the ability to vary composition ratios (such as WSi2, WSi3, MoSi2, NbSi2) and control layer thicknesses to tune critical parameters including superconducting transition temperature, critical current density, and energy gap, providing versatile control over superconducting attributes while ensuring high-quality interfaces through optimized material parameters

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention implements spatially varying material properties through controlled composition gradients and layer-specific engineering, where different regions of the superconducting layer can have different compositions to achieve locally optimized interface quality and tunable superconducting characteristics across the device structure

Inventive Principle:
Principle #3Local quality

3Power

If aluminum superconductors are used in Josephson junctions, then devices can be manufactured with current technology, but critical current is limited and performance is constrained

Engineering Contradiction:
Improvecritical currentVSAvoidfabrication complexity
Core Design Contradiction:
PowerVSEase of manufacture

Solution Approach 1:

The patent achieves enhanced critical current by transitioning to transition metal silicide materials which inherently support higher critical current densities due to their superior superconducting properties, while maintaining ease of manufacture through compatibility with standard semiconductor fabrication techniques such as sputtering and chemical vapor deposition

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention replaces the aluminum-based Josephson junction structure with transition metal silicide-based structures, substituting the material system to achieve higher critical current performance while leveraging existing fabrication infrastructure to minimize manufacturing complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the use of TMSi superconductors in qubit devices, providing high critical current across Josephson junctions and enabling the fabrication of scalable quantum computing components with improved performance.

Implementation Method 1

superconducting transition metal silicide (TMSi) structures suitable for use as qubit devices

Methodology Applied
Scientific EffectSuperconductivity: Superconductivity

Implementation Method 2

Josephson junctions and their applications in the field of superconducting solid-state electronic circuits

Methodology Applied
Scientific EffectJosephson effect: Josephson Effect

Implementation Method 3

thermal diffusion of a metal (e.g., by thermal annealing) into a silicon device layer of a silicon-on-insulator (SOI) wafer

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS11355690B2Superconducting qubit devices based on metal silicides
Publication Date: 2022.06.07 BROOKHAVEN SCIENCE ASSOCIATES LLC
  • US11355690B2 patent drawing
  • US11355690B2 patent drawing
  • US11355690B2 patent drawing

AI summary

A qubit device for use in a quantum computing environment includes a semiconductor substrate, an insulating layer disposed on at least a portion of an upper surface of the substrate, and a transition metal silicide (TMSi) heterojunction disposed on at least a portion of an upper surface of the insulating layer. The TMSi heterojunction includes a link layer and at least first and second TMSi regions coupled with the link layer. The link layer may include a normal conductor, thereby forming a superconductor-normal conductor-superconductor (SNS) junction, or a geometric constriction, thereby forming a superconductor-geometric constriction-superconductor (ScS) junction. The link layer may form at least a portion of a channel including intrinsic or doped silicon.