ToF Image Sensor Tap Structure for Power Reduction

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Solution Overview

Problem

Current image sensing devices, particularly CMOS image sensors, face challenges in efficiently detecting distance using Time-of-Flight (ToF) methods while maintaining low power consumption and high performance.

Innovation Solution

The design incorporates a substrate with pixel regions and taps structured to generate and capture photocharges, featuring a control node, detection node, and control gate configuration that creates an electric potential difference to enhance ToF pixel performance and reduce power consumption by optimizing the arrangement of control nodes and gates within the pixel array.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional CMOS image sensor structures are used for ToF applications, then device complexity is reduced and manufacturing is easier, but ToF pixel performance is insufficient and power consumption is high

Engineering Contradiction:
ImproveToF pixel performanceVSAvoidtap structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The pixel structure is segmented into distinct functional regions: pixel regions for light detection, taps for charge capture, control nodes for electric potential generation, and control gates for operation control. This segmentation allows each component to be optimized for its specific function, improving overall ToF pixel performance while maintaining manageable complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate are assigned different doping types and structures: pixel regions with first conductive type, taps with second conductive type, control nodes with specific doping concentrations, and control gates with insulating layers. This local differentiation of properties enables precise control of charge generation, transport, and capture processes, enhancing ToF performance

Inventive Principle:
Principle #3Local quality

2Measurement precision

If more control nodes and control gates are added to each pixel, then ToF pixel performance is improved, but power consumption increases

Engineering Contradiction:
Improvedistance measurement accuracyVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The control gates are operated in periodic cycles, alternating between active and inactive states to control charge capture at the taps. This periodic operation allows the system to achieve precise distance measurement through time-gated detection while reducing average power consumption by keeping control gates inactive during non-measurement periods

Inventive Principle:
Principle #19Periodic action

Solution Approach 2:

The control nodes automatically generate the necessary electric potential differences based on the incident light intensity and charge generation in pixel regions. This self-regulating mechanism reduces the need for external power control circuits, lowering overall power consumption while maintaining measurement precision

Inventive Principle:
Principle #25Self-service

3Area of stationary object

If control nodes and detection nodes are closely arranged, then device area is reduced, but electric potential difference generation becomes difficult

Engineering Contradiction:
Improvepixel array areaVSAvoidelectric potential difference
Core Design Contradiction:
Area of stationary objectVSPower

Solution Approach 1:

The control nodes and detection nodes are arranged in a three-dimensional configuration within the substrate, utilizing vertical depth in addition to horizontal plane positioning. This spatial arrangement allows sufficient electric potential difference generation through the substrate thickness while maintaining compact horizontal footprint, thus reducing overall device area without compromising power generation capability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the performance of ToF pixels while minimizing power consumption, enabling accurate distance measurement with reduced power usage, thus addressing the limitations of existing CMOS image sensors in ToF applications.

Implementation Method 1

a plurality of pixel regions included in a substrate and structured to detect incident light and generate photocharges corresponding to an intensity of the incident light

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

a plurality of taps structured to generate an electric potential difference in the substrate and capture the photocharges generated by the plurality of pixel regions and migrated by the electric potential difference

Methodology Applied
Scientific EffectElectric potential difference: Electric Field

Data Source

PatentUS20230118540A1Image sensing device
Publication Date: 2023.04.20 SK HYNIX INC
  • US20230118540A1 patent drawing
  • US20230118540A1 patent drawing
  • US20230118540A1 patent drawing

AI summary

An image sensing device may include a plurality of pixel regions included in a substrate, a plurality of taps structured to generate an electric potential difference in the substrate and capture photocharges generated by the plurality of pixel regions and migrated by the electric potential difference, wherein each of the taps comprises a control node disposed in the substrate and doped with a first conductive type impurity, a detection node disposed in the substrate and doped with a second conductive type impurity, and a control gate structured to include a gate electrode and a gate dielectric layer for electrically isolating the gate electrode from the substrate, wherein the control node is disposed at a first side of the detection node, and the control gate is disposed at a second side of the detection node, wherein the second side is an opposite side of the first side.