Toggle Arm Activation Prevention for Gas Valve Safety
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Solution Overview
Problem
The integration of a lockout/tagout mechanism into gas delivery systems is challenging due to the high density of flow components, particularly at gas stick inlet valves, which requires turning off all plasma gases and venting them, making it time-consuming and unsafe to debug or test individual gas sticks.
Innovation Solution
A pneumatically operated valve assembly with a toggle switch and an activation prevention mechanism that allows individual gas sticks to be quickly and safely deactivated by blocking compressed gas flow, incorporating a lockout/tagout mechanism that prevents accidental reactivation without bypassing the lockout function.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a lockout/tagout mechanism is integrated into gas delivery systems with high density flow components, then worker safety is improved, but the system complexity and space requirements increase
Solution Approach 1:
The activation prevention mechanism is nested within the existing valve assembly structure. The toggle switch is mechanically integrated into the valve body, and the lockout/tagout components are incorporated within the same housing, creating a compact nested arrangement that adds safety functionality without significantly increasing overall system complexity or space requirements
Solution Approach 2:
The patent combines multiple functions into a single integrated mechanism: the toggle switch for valve control, the activation prevention mechanism for safety, and the lockout/tagout capability for maintenance protection are merged into one unified assembly. This consolidation improves worker safety while minimizing the increase in device complexity by eliminating the need for separate standalone safety devices
2Reliability
If all plasma gases are turned off and vented for maintenance, then safety is improved, but the time required for debugging or testing individual gas sticks increases
Solution Approach 1:
The activation prevention mechanism enables segmentation of the gas delivery system, allowing individual gas sticks to be isolated and deactivated independently from the rest of the system. The toggle switch on each valve provides independent control, and the lockout/tagout mechanism can be applied to individual valves, enabling maintenance on one gas stick while others remain operational. This eliminates the need to shut down the entire system for individual maintenance tasks
3Reliability
If a lockout mechanism prevents accidental reactivation, then safety is improved, but the ease of operation decreases due to additional steps required
Solution Approach 1:
The toggle switch is designed to be moved to the off position before applying the lockout mechanism, creating a preliminary action sequence. This ensures the valve is already deactivated before locking, providing an additional safety layer. The preliminary action of toggling off first makes the subsequent locking step simpler and more intuitive, as the valve is already in the safe state
Solution Approach 2:
The lockout/tagout mechanism incorporates dynamic elements that allow for quick release and reactivation when needed. The mechanical lock can be rapidly engaged and disengaged, and the toggle switch provides immediate on/off capability. This dynamic design maintains safety through the locking mechanism while preserving operational flexibility and ease of reactivation when maintenance is complete
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables safe and efficient maintenance by allowing each gas stick to be individually locked or tagged, maintaining component density and improving worker safety by enabling quick shutdown and prevention of accidental reactivation.
Implementation Method 1
pneumatically operated valve assembly with a toggle switch and an activation prevention mechanism that allows individual gas sticks to be quickly and safely deactivated by blocking compressed gas flow
Data Source
AI summary
A mechanism for implementing at least one of activation and deactivation of a gas valve that is coupled to an input manifold of a processing chamber is provided. The mechanism includes a toggle arm disposed in one of a toggle activation position and a toggle deactivation position. The mechanism also includes a toggle operated switch coupled to the toggle arm and the gas valve. The toggle operated switch is disposed on top of the gas valve and the toggle arm is disposed on top of the toggle operated switch so as to minimize a footprint of an assembly that comprises the gas valve, the toggle operated switch, and the toggle arm. Thus, the process gas flow flows through the gas valve when the toggle arm is in the toggle activation position and is inhibited from flowing into the gas valve when the toggle arm is in the toggle deactivation position.